@misc{KalettaWipfFraschkeetal., author = {Kaletta, Udo Christian and Wipf, Christian and Fraschke, Mirko and Wolansky, Dirk and Schubert, Markus Andreas and Schroeder, Thomas and Wenger, Christian}, title = {AlN/SiO2/Si3N4/Si(100) based CMOS compatible surface acoustic wave filter with -12.8 dB minimum insertion loss}, series = {IEEE Transactions on Electron Devices}, volume = {62}, journal = {IEEE Transactions on Electron Devices}, number = {3}, issn = {0018-9383}, doi = {10.1109/TED.2015.2395443}, pages = {764 -- 768}, language = {en} } @misc{BertaudWalczykWalczyketal., author = {Bertaud, Thomas and Walczyk, Damian and Walczyk, Christian and Kubotsch, S. and Wenger, Christian and Schr{\"o}der, Thomas and Vall{\´e}e, Christophe and Gonon, P. and Mannequin, C. and Jousseaume, V. and Grampeix, Helen}, title = {Resistive Switching of HfO2-based MIM diodes: Impact of the Top Electrode Materials}, series = {Thin Solid Films}, volume = {520}, journal = {Thin Solid Films}, number = {14}, issn = {0040-6090}, pages = {4551 -- 4555}, language = {en} } @misc{BertaudWalczykSowinskaetal., author = {Bertaud, Thomas and Walczyk, Damian and Sowinska, Małgorzata and Wolansky, Dirk and Tillack, Bernd and Schoof, Gunther and Korolevych, R. and Wenger, Christian and Thiess, Sebastian and Schroeder, Thomas and Walczyk, Christian}, title = {HfO2-based RRAM for Embedded Nonvolatile Memory: From Materials Science to Integrated 1T1R RRAM Arrays}, series = {ECS transactions}, volume = {50}, journal = {ECS transactions}, number = {4}, issn = {1938-6737}, pages = {21 -- 26}, language = {en} } @misc{DerschPerezBoschQuesadaPerezetal., author = {Dersch, Nadine and Perez-Bosch Quesada, Emilio and Perez, Eduardo and Wenger, Christian and Roemer, Christian and Schwarz, Mike and Kloes, Alexander}, title = {Efficient circuit simulation of a memristive crossbar array with synaptic weight variability}, series = {Solid State Electronics}, volume = {209}, journal = {Solid State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2023.108760}, abstract = {In this paper, we present a method for highly-efficient circuit simulation of a hardware-based artificial neural network realized in a memristive crossbar array. The statistical variability of the devices is considered by a noise-based simulation technique. For the simulation of a crossbar array with 8 synaptic weights in Cadence Virtuoso the new approach shows a more than 200x speed improvement compared to a Monte Carlo approach, yielding the same results. In addition, first results of an ANN with more than 15,000 memristive devices classifying test data of the MNIST dataset are shown, for which the speed improvement is expected to be several orders of magnitude. Furthermore, the influence on the classification of parasitic resistances of the connection lines in the crossbar is shown.}, language = {en} } @misc{PerezMaldonadoAcaletal., author = {Perez, Eduardo and Maldonado, David and Acal, Christian and Ruiz-Castro, Juan Eloy and Aguilera, Ana Mar{\´i}a and Jimenez-Molinos, Francisco and Roldan, Juan Bautista and Wenger, Christian}, title = {Advanced Temperature Dependent Statistical Analysis of Forming Voltage Distributions for Three Different HfO2-Based RRAM Technologies}, series = {Solid State Electronics}, volume = {176}, journal = {Solid State Electronics}, issn = {0038-1101}, pages = {6}, abstract = {In this work, voltage distributions of forming operations are analyzed by using an advanced statistical approach based on phase-type distributions (PHD). The experimental data were collected from batches of 128 HfO2-based RRAM devices integrated in 4-kbit arrays. Three di erent switching oxides, namely, polycrystalline HfO2, amorphous HfO2, and Al-doped HfO2, were tested in the temperature range from -40 to 150 oC. The variability of forming voltages has been usually studied by using the Weibull distribution (WD). However, the performance of the PHD analysis demonstrated its ability to better model this crucial operation. The capacity of the PHD to reproduce the experimental data has been validated by means of the Kolmogorov-Smirnov test, while the WD failed in many of the cases studied. In addition, PHD allows to extract information about intermediate probabilistic states that occur in the forming process and the transition probabilities between them; in this manner, we can deepen on the conductive lament formation physics. In particular, the number of intermediate states can be related to the device variability.}, language = {en} } @misc{MaiMarschmeyerPeczeketal., author = {Mai, Christian and Marschmeyer, Steffen and Peczek, Anna and Kroh, Aleksandra and Jose, Josmy and Reiter, Sebastian and Fischer, Inga Anita and Wenger, Christian and Mai, Andreas}, title = {Integration Aspects of Plasmonic TiN-based Nano-Hole-Arrays on Ge Photodetectorsin a 200mm Wafer CMOS Compatible Silicon Technology}, series = {ECS Transactions}, volume = {109}, journal = {ECS Transactions}, number = {4}, issn = {1938-5862}, doi = {10.1149/10904.0035ecst}, pages = {35 -- 46}, abstract = {In this work we present the progress in regard to the integration of a surface plasmon resonance refractive index sensor into a CMOS compatible 200 mm wafer silicon-based technology. Our approach pursues the combination of germanium photodetectors with metallic nanohole arrays. The paper is focused on the technology development to fabricate large area photodetectors based on a modern design concept. In a first iteration we achieved a leakage current density of 82 mA/cm2 at reverse bias of 0.5 V and a maximum optical responsivity of 0.103 A/W measured with TE polarized light at λ = 1310 nm and a reversed bias of 1 V. For the realization of nanohole arrays we used thin Titanium nitride (TiN) layers deposited by a sputtering process. We were able to produce very homogenous TiN layers with a thickness deviation of around 10 \% and RMS of 1.413 nm for 150 nm thick TiN layers.}, language = {en} } @misc{HanReiterSchlipfetal., author = {Han, Weijia and Reiter, Sebastian and Schlipf, Jon and Mai, Christian and Spirito, Davide and Jose, Josmy and Wenger, Christian and Fischer, Inga Anita}, title = {Strongly enhanced sensitivities of CMOS compatible plasmonic titanium nitride nanohole arrays for refractive index sensing under oblique incidence}, series = {Optics Express}, volume = {31}, journal = {Optics Express}, number = {11}, issn = {1094-4087}, doi = {10.1364/OE.481993}, pages = {17389 -- 17407}, abstract = {Titanium nitride (TiN) is a complementary metal-oxide-semiconductor (CMOS) compatible material with large potential for the fabrication of plasmonic structures suited for device integration. However, the comparatively large optical losses can be detrimental for application. This work reports a CMOS compatible TiN nanohole array (NHA) on top of a multilayer stack for potential use in integrated refractive index sensing with high sensitivities at wavelengths between 800 and 1500 nm. The stack, consisting of the TiN NHA on a silicon dioxide (SiO2) layer with Si as substrate (TiN NHA/SiO2/Si), is prepared using an industrial CMOS compatible process. The TiN NHA/SiO2/Si shows Fano resonances in reflectance spectra under oblique excitation, which are well reproduced by simulation using both finite difference time domain (FDTD) and rigorous coupled-wave analysis (RCWA) methods. The sensitivities derived from spectroscopic characterizations increase with the increasing incident angle and match well with the simulated sensitivities. Our systematic simulation-based investigation of the sensitivity of the TiN NHA/SiO2/Si stack under varied conditions reveals that very large sensitivities up to 2305 nm per refractive index unit (nm RIU-1) are predicted when the refractive index of superstrate is similar to that of the SiO2 layer. We analyze in detail how the interplay between plasmonic and photonic resonances such as surface plasmon polaritons (SPPs), localized surface plasmon resonances (LSPRs), Rayleigh Anomalies (RAs), and photonic microcavity modes (Fabry-P{\´e}rot resonances) contributes to this result. This work not only reveals the tunability of TiN nanostructures for plasmonic applications but also paves the way to explore efficient devices for sensing in broad conditions.}, language = {en} } @misc{ReiterHanMaietal., author = {Reiter, Sebastian and Han, Weijia and Mai, Christian and Spirito, Davide and Jose, Josmy and Z{\"o}llner, Marvin Hartwig and Fursenko, Oksana and Schubert, Markus Andreas and Stemmler, Ivo and Wenger, Christian and Fischer, Inga Anita}, title = {Titanium Nitride Plasmonic Nanohole Arrays for CMOS-Compatible Integrated Refractive Index Sensing: Influence of Layer Thickness on Optical Properties}, series = {Plasmonics}, journal = {Plasmonics}, issn = {1557-1963}, doi = {10.1007/s11468-023-01810-3}, pages = {1 -- 13}, language = {en} } @misc{MatbaechiEttehadWenger, author = {Matbaechi Ettehad, Honeyeh and Wenger, Christian}, title = {Characterization and Separation of Live and Dead Yeast Cells Using CMOS-Based DEP Microfluidics}, series = {Micromachines}, volume = {12}, journal = {Micromachines}, number = {3}, issn = {2072-666X}, doi = {10.3390/mi12030270}, pages = {19}, abstract = {This study aims at developing a miniaturized CMOS integrated silicon-based microfluidic system, compatible with a standard CMOS process, to enable the characterization, and separation of live and dead yeast cells (as model bio-particle organisms) in a cell mixture using the DEP technique. DEP offers excellent benefits in terms of cost, operational power, and especially easy electrode integration with the CMOS architecture, and requiring label-free sample preparation. This can increase the likeliness of using DEP in practical settings. In this work the DEP force was generated using an interdigitated electrode arrays (IDEs) placed on the bottom of a CMOS-based silicon microfluidic channel. This system was primarily used for the immobilization of yeast cells using DEP. This study validated the system for cell separation applications based on the distinct responses of live and dead cells and their surrounding media. The findings confirmed the device's capability for efficient, rapid and selective cell separation. The viability of this CMOS embedded microfluidic for dielectrophoretic cell manipulation applications and compatibility of the dielectrophoretic structure with CMOS production line and electronics, enabling its future commercially mass production.}, language = {en} } @misc{SoltaniZarrinWenger, author = {Soltani Zarrin, Pouya and Wenger, Christian}, title = {Implementation of Siamese-Based Few-Shot Learning Algorithms for the Distinction of COPD and Asthma Subjects}, series = {Artificial Neural Networks and Machine Learning - ICANN 2020 : 29th International Conference on Artificial Neural Networks, Bratislava, Slovakia, September 15-18, 2020, Proceedings, Part I}, journal = {Artificial Neural Networks and Machine Learning - ICANN 2020 : 29th International Conference on Artificial Neural Networks, Bratislava, Slovakia, September 15-18, 2020, Proceedings, Part I}, publisher = {Springer}, address = {Cham}, doi = {10.1007/978-3-030-61609-0_34}, pages = {431 -- 440}, abstract = {This paper investigates the practicality of applying braininspired Few-Shot Learning (FSL) algorithms for addressing shortcomings of Machine Learning (ML) methods in medicine with limited data availability. As a proof of concept, the application of ML for the detection of Chronic Obstructive Pulmonary Disease (COPD) patients was investigated. The complexities associated with the distinction of COPD and asthma patients and the lack of sufficient training data for asthma subjects impair the performance of conventional ML models for the recognition of COPD. Therefore, the objective of this study was to implement FSL methods for the distinction of COPD and asthma subjects with a few available data points. The proposed FSL models in this work were capable of recognizing asthma and COPD patients with 100\% accuracy, demonstrating the feasibility of the approach for applications such as medicine with insufficient data availability.}, language = {en} } @misc{PerezAvilaGonzalezCorderoPerezetal., author = {Perez-Avila, Antonio Javier and Gonzalez-Cordero, Gerardo and Perez, Eduardo and Perez-Bosch Quesada, Emilio and Mahadevaiah, Mamathamba Kalishettyhalli and Wenger, Christian and Roldan, Juan Bautista and Jimenez-Molinos, Francisco}, title = {Behavioral modeling of multilevel HfO2-based memristors for neuromorphic circuit simulation}, series = {XXXV Conference on Design of Circuits and Integrated Systems (DCIS), Segovia, Spain}, journal = {XXXV Conference on Design of Circuits and Integrated Systems (DCIS), Segovia, Spain}, doi = {10.1109/DCIS51330.2020.9268652}, abstract = {An artificial neural network based on resistive switching memristors is implemented and simulated in LTspice. The influence of memristor variability and the reduction of the continuous range of synaptic weights into a discrete set of conductance levels is analyzed. To do so, a behavioral model is proposed for multilevel resistive switching memristors based on Al-doped HfO2 dielectrics, and it is implemented in a spice based circuit simulator. The model provides an accurate description of the conductance in the different conductive states in addition to describe the device-to-device variability}, language = {en} } @misc{MoralesMahmoodinezhadSchubertetal., author = {Morales, Carlos and Mahmoodinezhad, Ali and Schubert, Andreas Markus and Wenger, Christian and Henkel, Karsten and Flege, Jan Ingo}, title = {Functional ultra-thin oxide films deposited by atomic layer deposition on structured substrates}, series = {Verhandlungen der DPG - SurfaceScience21}, volume = {2021}, journal = {Verhandlungen der DPG - SurfaceScience21}, publisher = {Deutsche Physikalische Gesellschaft e.V.}, address = {Bad Honnef}, abstract = {In the last decades, atomic layer deposition (ALD) has gained prominence in the materials and surface science communities owing to its high potential for integration as a scalable process in microelectronics. ALD's largest strengths are its well-controlled layer-by-layer deposition and growth conformity on 3D structures. Yet, the ALD technique is also well known to lead to amorphous and defective, non-stoichiometric thin films, resulting in modified materials properties that may even preferentially be used in certain applications. To study these issues, we have developed an in-situ ALD reactor attached to an X-ray photoelectron spectroscopy (XPS) system, capable of switching between both pump and flow-type operation. This novel tool allows to cover the entire range of compounds and recipes used in ALD, thus clarifying the role of such defects at different deposition stages, growth conditions and film/substrate interfaces. To exemplify these sorts of studies, we show the deposition of Al2O3 5-10 nm films on nanostructured Si, and their use as substrates for functional CeOx ALD deposits.}, language = {en} } @misc{PerezPerezAvilaRomeroZalizetal., author = {Perez, Eduardo and P{\´e}rez-{\´A}vila, Antonio Javier and Romero-Zaliz, Roc{\´i}o and Mahadevaiah, Mamathamba Kalishettyhalli and P{\´e}rez-Bosch Quesada, Emilio and Roldan, Juan Bautista and Jim{\´e}nez-Molinos, Francisco and Wenger, Christian}, title = {Optimization of Multi-Level Operation in RRAM Arrays for In-Memory Computing}, series = {Electronics (MDPI)}, volume = {10}, journal = {Electronics (MDPI)}, number = {9}, issn = {2079-9292}, doi = {10.3390/electronics10091084}, pages = {15}, abstract = {Accomplishing multi-level programming in resistive random access memory (RRAM) arrays with truly discrete and linearly spaced conductive levels is crucial in order to implement synaptic weights in hardware-based neuromorphic systems. In this paper, we implemented this feature on 4-kbit 1T1R RRAM arrays by tuning the programming parameters of the multi-level incremental step pulse with verify algorithm (M-ISPVA). The optimized set of parameters was assessed by comparing its results with a non-optimized one. The optimized set of parameters proved to be an effective way to define non-overlapped conductive levels due to the strong reduction of the device-to-device variability as well as of the cycle-to-cycle variability, assessed by inter-levels switching tests and during 1k reset-set cycles. In order to evaluate this improvement in real scenarios, the experimental characteristics of the RRAM devices were captured by means of a behavioral model, which was used to simulate two different neuromorphic systems: an 8×8 vector-matrixmultiplication (VMM) accelerator and a 4-layer feedforward neural network for MNIST database recognition. The results clearly showed that the optimization of the programming parameters improved both the precision of VMM results as well as the recognition accuracy of the neural network in about 6\% compared with the use of non-optimized parameters.}, language = {en} } @misc{PerezMahadevaiahPerezBoschQuesadaetal., author = {Perez, Eduardo and Mahadevaiah, Mamathamba Kalishettyhalli and Perez-Bosch Quesada, Emilio and Wenger, Christian}, title = {Variability and Energy Consumption Tradeoffs in Multilevel Programming of RRAM Arrays}, series = {IEEE Transactions on Electron Devices}, volume = {68}, journal = {IEEE Transactions on Electron Devices}, number = {6}, issn = {0018-9383}, doi = {10.1109/TED.2021.3072868}, pages = {2693 -- 2698}, abstract = {Achieving a reliable multi-level programming operation in resistive random access memory (RRAM) arrays is still a challenging task. In this work, we assessed the impact of the voltage step value used by the programming algorithm on the device-to-device (DTD) variability of the current distributions of four conductive levels and on the energy consumption featured by programming 4-kbit HfO2-based RRAM arrays. Two different write-verify algorithms were considered and compared, namely, the incremental gate voltage with verify algorithm (IGVVA) and the incremental step pulse with verify algorithm (ISPVA). By using the IGVVA, a main trade-off has to be taken into account since reducing the voltage step leads to a smaller DTD variability at the cost of a strong increase in the energy consumption. Although the ISPVA can not reduce the DTD variability as much as the IGVVA, its voltage step can be decreased in order to reduce the energy consumption with almost no impact on the DTD variability. Therefore, the final decision on which algorithm to employ should be based on the specific application targeted for the RRAM array.}, language = {en} } @misc{RomeroZalizPerezJimenezMolinosetal., author = {Romero-Zaliz, Roc{\´i}o and Perez, Eduardo and Jimenez-Molinos, Francisco and Wenger, Christian and Roldan, Juan Bautista}, title = {Influence of variability on the performance of HfO2 memristor-based convolutional neural networks}, series = {Solid State Electronics}, volume = {185}, journal = {Solid State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2021.108064}, pages = {5}, abstract = {A study of convolutional neural networks (CNNs) was performed to analyze the influence of quantization and variability in the network synaptic weights. Different CNNs were considered accounting for the number of convolutional layers, size of the filters in the convolutional layer, number of neurons in the final network layers and different sets of quantization levels. The conductance levels of fabricated 1T1R structures based on HfO2 memristors were considered as reference for four or eight level quantization processes at the inference stage of the CNNs, which were previous trained with the MNIST dataset. We also included the variability of the experimental conductance levels that was found to be Gaussian distributed and was correspondingly modeled for the synaptic weight implementation.}, language = {en} } @misc{YunLeeKimetal., author = {Yun, Min Ju and Lee, Doowon and Kim, Sungho and Wenger, Christian and Kim, Hee-Dong}, title = {A nonlinear resistive switching behaviors of Ni/HfO2/TiN memory structures for self-rectifying resistive switching memory}, series = {Materials Characterization}, volume = {182}, journal = {Materials Characterization}, issn = {1044-5803}, doi = {10.1016/j.matchar.2021.111578}, pages = {7}, abstract = {This work reports forming free/self-rectifying resistive switching characteristics and dependency of the top electrode (TE) of a crystalline HfO2-based resistive switching memory device. In the memory cells, nonlinear bipolar resistive switching characteristics, i.e., an asymmetric current-voltage curve like the Schottky diode, was observed. In addition, the device exhibits resistive switching behaviors without forming process, which makes it possible to switch the resistance state under ultra-low current levels of <10 nA. In addition, compared to the resistive switching of the proposed resistive switching memory devices with different TEs, the VSET was decreased when using TE with lower work function, and the height read margin was obtained in the sample with the Ni TE, covering over 56 × 56 arrays. Consequently, these results indicate that the interface control resistive switching properties in memory structures having the Schottky junction warrant the realization of selector-free resistive switching memory cells in a high-density crossbar array.}, language = {en} } @misc{PerezBoschQuesadaPerezMahadevaiahetal., author = {Perez-Bosch Quesada, Emilio and Perez, Eduardo and Mahadevaiah, Mamathamba Kalishettyhalli and Wenger, Christian}, title = {Memristive-based in-memory computing: from device to large-scale CMOS integration}, series = {Neuromorphic Computing and Engineering}, volume = {1}, journal = {Neuromorphic Computing and Engineering}, number = {2}, issn = {2634-4386}, doi = {10.1088/2634-4386/ac2cd4}, pages = {8}, abstract = {With the rapid emergence of in-memory computing systems based on memristive technology, the integration of such memory devices in large-scale architectures is one of the main aspects to tackle. In this work we present a study of HfO2-based memristive devices for their integration in large-scale CMOS systems, namely 200 mm wafers. The DC characteristics of single metal-insulator-metal devices are analyzed taking under consideration device-to-device variabilities and switching properties. Furthermore, the distribution of the leakage current levels in the pristine state of the samples are analyzed and correlated to the amount of formingless memristors found among the measured devices. Finally, the obtained results are fitted into a physic-based compact model that enables their integration into larger-scale simulation environments.}, language = {en} } @misc{RomeroZalizCantudoPerezetal., author = {Romero-Zaliz, Rocio and Cantudo, Antonio and Perez, Eduardo and Jimenez-Molinos, Francisco and Wenger, Christian and Roldan, Juan Bautista}, title = {An Analysis on the Architecture and the Size of Quantized Hardware Neural Networks Based on Memristors}, series = {Electronics (MDPI)}, volume = {10}, journal = {Electronics (MDPI)}, number = {24}, issn = {2079-9292}, doi = {10.3390/electronics10243141}, abstract = {We have performed different simulation experiments in relation to hardware neural networks (NN) to analyze the role of the number of synapses for different NN architectures in the network accuracy, considering different datasets. A technology that stands upon 4-kbit 1T1R ReRAM arrays, where resistive switching devices based on HfO2 dielectrics are employed, is taken as a reference. In our study, fully dense (FdNN) and convolutional neural networks (CNN) were considered, where the NN size in terms of the number of synapses and of hidden layer neurons were varied. CNNs work better when the number of synapses to be used is limited. If quantized synaptic weights are included, we observed thatNNaccuracy decreases significantly as the number of synapses is reduced; in this respect, a trade-off between the number of synapses and the NN accuracy has to be achieved. Consequently, the CNN architecture must be carefully designed; in particular, it was noticed that different datasets need specific architectures according to their complexity to achieve good results. It was shown that due to the number of variables that can be changed in the optimization of a NN hardware implementation, a specific solution has to be worked in each case in terms of synaptic weight levels, NN architecture, etc.}, language = {en} } @misc{BischoffLeisePerezBoschQuesadaetal., author = {Bischoff, Carl and Leise, Jakob and Perez-Bosch Quesada, Emilio and Perez, Eduardo and Wenger, Christian and Kloes, Alexander}, title = {Implementation of device-to-device and cycle-to-cycle variability of memristive devices in circuit simulations}, series = {Solid-State Electronics}, volume = {194}, journal = {Solid-State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2022.108321}, pages = {4}, abstract = {We present a statistical procedure for the extraction of parameters of a compact model for memristive devices. Thereby, in a circuit simulation the typical fluctuations of the current-voltage (I-V) characteristics from device-to-device (D2D) and from cycle-to-cycle (C2C) can be emulated. The approach is based on the Stanford model whose parameters play a key role to integrating D2D and C2C dispersion. The influence of such variabilities over the model's parameters is investigated by using a fitting algorithm fed with experimental data. After this, the statistical distributions of the parameters are used in a Monte Carlo simulation to reproduce the I-V D2D and C2C dispersions which show a good agreement to the measured curves. The results allow the simulation of the on/off current variation for the design of RRAM cells or memristor-based artificial neural networks.}, language = {en} } @misc{MannocciBaroniMelacarneetal., author = {Mannocci, Piergiulio and Baroni, Andrea and Melacarne, Enrico and Zambelli, Cristian and Olivo, Piero and Perez, Eduardo and Wenger, Christian and Ielmini, Daniele}, title = {In-Memory Principal Component Analysis by Crosspoint Array of Rresistive Switching Memory}, series = {IEEE Nanotechnology Magazine}, volume = {16}, journal = {IEEE Nanotechnology Magazine}, number = {2}, issn = {1932-4510}, doi = {10.1109/MNANO.2022.3141515}, pages = {4 -- 13}, abstract = {In Memory Computing (IMC) is one of the most promising candidates for data-intensive computing accelerators of machine learning (ML). A key ML algorithm for dimensionality reduction and classification is principal component analysis (PCA), which heavily relies on matrixvector multiplications (MVM) for which classic von Neumann architectures are not optimized. Here, we provide the experimental demonstration of a new IMCbased PCA algorithm based on power iteration and deflation executed in a 4-kbit array of resistive switching random-access memory (RRAM). The classification accuracy of the Wisconsin Breast Cancer data set reaches 95.43\%, close to floatingpoint implementation. Our simulations indicate a 250× improvement in energy efficiency compared to commercial GPUs, thus supporting IMC for energy-efficient ML in modern data-intensive computing.}, language = {en} } @misc{MahadevaiahPerezLiskeretal., author = {Mahadevaiah, Mamathamba Kalishettyhalli and Perez, Eduardo and Lisker, Marco and Schubert, Markus Andreas and Perez-Bosch Quesada, Emilio and Wenger, Christian and Mai, Andreas}, title = {Modulating the Filamentary-Based Resistive Switching Properties of HfO2 Memristive Devices by Adding Al2O3 Layers}, series = {Electronics : open access journal}, volume = {11}, journal = {Electronics : open access journal}, number = {10}, issn = {2079-9292}, doi = {10.3390/electronics11101540}, pages = {14}, abstract = {The resistive switching properties of HfO2 based 1T-1R memristive devices are electrically modified by adding ultra-thin layers of Al2O3 into the memristive device. Three different types of memristive stacks are fabricated in the 130 nm CMOS technology of IHP. The switching properties of the memristive devices are discussed with respect to forming voltages, low resistance state and high resistance state characteristics and their variabilities. The experimental I-V characteristics of set and reset operations are evaluated by using the quantum point contact model. The properties of the conduction filament in the on and off states of the memristive devices are discussed with respect to the model parameters obtained from the QPC fit.}, language = {en} } @misc{WenBaroniPerezetal., author = {Wen, Jianan and Baroni, Andrea and Perez, Eduardo and Ulbricht, Markus and Wenger, Christian and Krstic, Milos}, title = {Evaluating Read Disturb Effect on RRAM based AI Accelerator with Multilevel States and Input Voltages}, series = {2022 IEEE International Symposium on Defect and Fault Tolerance in VLSI and Nanotechnology Systems (DFT)}, journal = {2022 IEEE International Symposium on Defect and Fault Tolerance in VLSI and Nanotechnology Systems (DFT)}, isbn = {978-1-6654-5938-9}, issn = {2765-933X}, doi = {10.1109/DFT56152.2022.9962345}, pages = {1 -- 6}, abstract = {RRAM technology is a promising candidate for implementing efficient AI accelerators with extensive multiply-accumulate operations. By scaling RRAM devices to the synaptic crossbar array, the computations can be realized in situ, avoiding frequent weights transfer between the processing units and memory. Besides, as the computations are conducted in the analog domain with high flexibility, applying multilevel input voltages to the RRAM devices with multilevel conductance states enhances the computational efficiency further. However, several non-idealities existing in emerging RRAM technology may degrade the reliability of the system. In this paper, we measured and investigated the impact of read disturb on RRAM devices with different input voltages, which incurs conductance drifts and introduces errors. The measured data are deployed to simulate the RRAM based AI inference engines with multilevel states.}, language = {en} } @misc{AkhtarDabrowskiLukoseetal., author = {Akhtar, Fatima and Dabrowski, Jaroslaw and Lukose, Rasuole and Wenger, Christian and Lukosius, Mindaugas}, title = {Chemical Vapor Deposition Growth of Graphene on 200 mm Ge (110)/Si Wafers and Ab Initio Analysis of Differences in Growth Mechanisms on Ge (110) and Ge (001)}, series = {ACS Applied Materials \& Interfaces}, volume = {15}, journal = {ACS Applied Materials \& Interfaces}, number = {30}, issn = {1944-8244}, doi = {10.1021/acsami.3c05860}, pages = {36966 -- 36974}, abstract = {For the fabrication of modern graphene devices, uniform growth of high-quality monolayer graphene on wafer scale is important. This work reports on the growth of large-scale graphene on semiconducting 8 inch Ge(110)/Si wafers by chemical vapor deposition and a DFT analysis of the growth process. Good graphene quality is indicated by the small FWHM (32 cm-1) of the Raman 2D band, low intensity ratio of the Raman D and G bands (0.06), and homogeneous SEM images and is confirmed by Hall measurements: high mobility (2700 cm2/Vs) and low sheet resistance (800 Ω/sq). In contrast to Ge(001), Ge(110) does not undergo faceting during the growth. We argue that Ge(001) roughens as a result of vacancy accumulation at pinned steps, easy motion of bonded graphene edges across (107) facets, and low energy cost to expand Ge area by surface vicinals, but on Ge(110), these mechanisms do not work due to different surface geometries and complex reconstruction.}, language = {en} } @misc{RizziBaroniGlukhovetal., author = {Rizzi, Tommaso and Baroni, Andrea and Glukhov, Artem and Bertozzi, Davide and Wenger, Christian and Ielmini, Daniele and Zambelli, Cristian}, title = {Process-Voltage-Temperature Variations Assessment in Energy-Aware Resistive RAM-Based FPGAs}, series = {IEEE Transactions on Device and Materials Reliability}, volume = {23}, journal = {IEEE Transactions on Device and Materials Reliability}, number = {3}, issn = {1530-4388}, doi = {10.1109/TDMR.2023.3259015}, pages = {328 -- 336}, abstract = {Resistive Random Access Memory (RRAM) technology holds promises to improve the Field Programmable Gate Array (FPGA) performance, reduce the area footprint, and dramatically lower run-time energy requirements compared to the state-of-the-art CMOS-based products. However, the integration of RRAM in FPGAs is hindered by the high programming power consumption and by non-ideal behaviors of the device due to its stochastic nature that may overshadow the benefits in normal operation mode. To cope with these challenges, optimized programming strategies have to be investigated. In this work, we explore the impact that different procedures to set the device have on the run-time performance. Process, voltage, and temperature (PVT) variations as well as time-dependent drift effect of the RRAM device are considered in the assessment of 4T1R MUX designs characteristics. The comparison with tradition CMOS implementations reveals how the choice of the target resistive state and the programming algorithm are key design aspects to reduce the run-time delay and energy metrics, while at the same time improving the robustness against the different sources of variations.}, language = {en} } @misc{PerezMaldonadoMahadevaiahetal., author = {Perez, Eduardo and Maldonado, David and Mahadevaiah, Mamathamba Kalishettyhalli and Perez-Bosch Quesada, Emilio and Cantudo, Antonio and Jimenez-Molinos, Francisco and Wenger, Christian and Roldan, Juan Bautista}, title = {A comparison of resistive switching parameters for memristive devices with HfO2 monolayers and Al2O3/HfO2 bilayers at the wafer scale}, series = {14th Spanish Conference on Electron Devices (CDE 2023), Valencia, Spain, 06-08 June 2023}, journal = {14th Spanish Conference on Electron Devices (CDE 2023), Valencia, Spain, 06-08 June 2023}, publisher = {Institute of Electrical and Electronics Engineers (IEEE)}, isbn = {979-8-3503-0240-0}, doi = {10.1109/CDE58627.2023.10339417}, pages = {5}, abstract = {Memristive devices integrated in 200 mm wafers manufactured in 130 nm CMOS technology with two different dielectrics, namely, a HfO2 monolayer and an Al2O3/HfO2 bilayer, have been measured. The cycle-to-cycle (C2C) and device-todevice (D2D) variability have been analyzed at the wafer scale using different numerical methods to extract the set (Vset) and reset (Vreset) voltages. Some interesting differences between both technologies were found in terms of switching characteristics}, language = {en} } @misc{MoralesMahmoodinezhadTschammeretal., author = {Morales, Carlos and Mahmoodinezhad, Ali and Tschammer, Rudi and Kosto, Yuliia and Alvarado Chavarin, Carlos and Schubert, Markus Andreas and Wenger, Christian and Henkel, Karsten and Flege, Jan Ingo}, title = {Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates}, series = {Inorganics}, volume = {11}, journal = {Inorganics}, number = {12}, issn = {2304-6740}, doi = {10.3390/inorganics11120477}, abstract = {This work presents a new ultra-high vacuum cluster tool to perform systematic studies of the early growth stages of atomic layer deposited (ALD) ultrathin films following a surface science approach. By combining operando (spectroscopic ellipsometry and quadrupole mass spectrometry) and in situ (X-ray photoelectron spectroscopy) characterization techniques, the cluster allows us to follow the evolution of substrate, film, and reaction intermediates as a function of the total number of ALD cycles, as well as perform a constant diagnosis and evaluation of the ALD process, detecting possible malfunctions that could affect the growth, reproducibility, and conclusions derived from data analysis. The homemade ALD reactor allows the use of multiple precursors and oxidants and its operation under pump and flow-type modes. To illustrate our experimental approach, we revisit the well-known thermal ALD growth of Al2O3 using trimethylaluminum and water. We deeply discuss the role of the metallic Ti thin film substrate at room temperature and 200 °C, highlighting the differences between the heterodeposition (<10 cycles) and the homodeposition (>10 cycles) growth regimes at both conditions. This surface science approach will benefit our understanding of the ALD process, paving the way toward more efficient and controllable manufacturing processes.}, language = {en} } @misc{CapistaLukoseMajnoonetal., author = {Capista, Daniele and Lukose, Rasuole and Majnoon, Farnaz and Lisker, Marco and Wenger, Christian and Lukosius, Mindaugas}, title = {Study on the metal -graphene contact resistance achieved with one -dimensional contact architecture}, series = {IEEE Nanotechnology Materials and Devices Conference (NMDC 2023), Paestum, Italy, 22-25 October 2023}, journal = {IEEE Nanotechnology Materials and Devices Conference (NMDC 2023), Paestum, Italy, 22-25 October 2023}, publisher = {Institute of Electrical and Electronics Engineers (IEEE)}, isbn = {979-8-3503-3546-0}, doi = {10.1109/NMDC57951.2023.10343775}, pages = {118 -- 119}, abstract = {Graphene has always been considered as one of the materials with the greatest potential for the realization of improved microelectronic and photonic devices. But to actually reach its full potential in Si CMOS technology, graphene -based devices need to overcome different challenges. They do not only need to have better performances than standard devices, but they also need to be compatible with the production of standard Si based devices. To address the first challenge the main route requires the optimization of the contact resistance, that highly reduces the devices performance, while the second challenges requires the integration of graphene inside the standard production lines used for microelectronic. In this work we used an 8" wafer pilot -line to realize our devices and we studied the behavior of the contact resistance between metal and graphene obtained by one -dimensional contact architecture between the two materials. The contact resistance has been measured by means of Transmission Line Method (TLM) with several contact patterning.}, language = {en} } @misc{LukosiusLukoseLiskeretal., author = {Lukosius, Mindaugas and Lukose, Rasuolė and Lisker, Marco and Dubey, P. K. and Raju, A. I. and Capista, Daniele and Majnoon, Farnaz and Mai, A. and Wenger, Christian}, title = {Developments of Graphene devices in 200 mm CMOS pilot line}, series = {Proc. Nanotechnology Materials and Devices Conference (NMDC 2023),Paestum, Italy, 22-25 October 2023}, journal = {Proc. Nanotechnology Materials and Devices Conference (NMDC 2023),Paestum, Italy, 22-25 October 2023}, publisher = {Institute of Electrical and Electronics Engineers (IEEE)}, isbn = {979-8-3503-3546-0}, doi = {10.1109/NMDC57951.2023.10343569}, pages = {505 -- 506}, abstract = {Due to the unique electronic band structure, graphene has opened great potential to extend the functionality of a large variety of devices. Despite the significant progress in the fabrication of various graphene based microelectronic devices, the integration of graphene devices still lack the stability and compatibility with Si-technology processes. Therefore, the investigation and preparation of graphene devices in conditions resembling as close as possible the Si technology environment is of highest importance. This study aims to explore various aspects of graphene research on a 200mm pilot line, with a focus on simulations and fabrication of graphene modulator. To be more precise, it includes design and fabrication of the layouts, necessary mask sets, creation of the flows, fabrication, and measurements of the Gr modulators on 200 mm wafers.}, language = {en} } @misc{MaldonadoCantudoPerezetal., author = {Maldonado, David and Cantudo, Antonio and Perez, Eduardo and Romero-Zaliz, Rocio and Perez-Bosch Quesada, Emilio and Mahadevaiah, Mamathamba Kalishettyhalli and Jimenez-Molinos, Francisco and Wenger, Christian and Roldan, Juan Bautista}, title = {TiN/Ti/HfO2/TiN Memristive Devices for Neuromorphic Computing: From Synaptic Plasticity to Stochastic Resonance}, series = {Frontiers in Neuroscience}, volume = {17}, journal = {Frontiers in Neuroscience}, issn = {1662-4548}, doi = {10.3389/fnins.2023.1271956}, abstract = {We characterize TiN/Ti/HfO2/TiN memristive devices for neuromorphic computing. We analyze different features that allow the devices to mimic biological synapses and present the models to reproduce analytically some of the data measured. In particular, we have measured the spike timing dependent plasticity behavior in our devices and later on we have modeled it. The spike timing dependent plasticity model was implemented as the learning rule of a spiking neural network that was trained to recognize the MNIST dataset. Variability is implemented and its influence on the network recognition accuracy is considered accounting for the number of neurons in the network and the number of training epochs. Finally, stochastic resonance is studied as another synaptic feature.It is shown that this effect is important and greatly depends on the noise statistical characteristics.}, language = {en} } @article{SohalLupinaLippertetal., author = {Sohal, Rakesh and Lupina, Grzegorz and Lippert, Gunther and Wenger, Christian and Seifarth, Olaf and Schr{\"o}der, Thomas and Tallarida, Massimo and Schmeißer, Dieter}, title = {Interface chemistry of high-k PrxAl2-xO3 (x=2-0) dielectrics on TiN for dynamic random access memory applications}, language = {en} } @misc{LupinaDabrowskiFormaneketal., author = {Lupina, Grzegorz and Dabrowski, Jarek Marek and Formanek, Peter and Schmeißer, Dieter and Sorge, Roland and Wenger, Christian and Zaumseil, Peter and M{\"u}ssig, Hans-Joachim}, title = {Solid-state reaction between Pr and SiO2 studied by photoelectron spectroscopy and ab initio calculations}, series = {Materials Science in Semiconductor Processing}, volume = {7}, journal = {Materials Science in Semiconductor Processing}, number = {4-6}, issn = {1369-8001}, pages = {215 -- 220}, abstract = {We report on the structural and electrical properties of Pr-based high-k dielectric films fabricated by solid-state reaction between metallic Pr and SiO2 underlayers. A non-destructive depth profiling using synchrotron radiation excited photoelectron spectroscopy (SR-PES), X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM) were employed to examine the chemical composition and microstructure. Ab initio calculations were done to gain insight into the physical processes involved. SR-PES results indicate that Pr deposition at room temperature (RT) leads to the formation of a Pr silicide and a Pr oxide, what is in good agreement with the scenario expected from ab initio calculations. As revealed by TEM and electrical measurements, oxidation of the reacted structures, followed by annealing, results in a stacked dielectric composed of a SiO2-based buffer with an enhanced permittivity and a Pr silicate film with a high dielectric constant. The leakage current density of 10-4 A/cm2 was measured for stacks with capacitance equivalent thickness (CET) of 1.5 nm prepared by evaporation of the Pr layer on a 1.8 nm SiO2 film, followed by oxidation in air ambient and annealing in N2 atmosphere. The capacitance-voltage (C-V) curves exhibit a large flatband voltage (VFB) shift indicating the presence of a positive charge in the stack. Switching away from the Al contacts to Au gate electrodes introduces a significant reduction of the VFB by 1.3 eV, what is much more than the change expected from the work function difference between Al and Au (not, vert, similar0.9 eV). This in turn implies that VFB is strongly affected by the gate interface electrode.}, language = {en} } @misc{MuessigDabrowskiWengeretal., author = {M{\"u}ssig, Hans-Joachim and Dabrowski, Jarek Marek and Wenger, Christian and Lupina, Grzegorz and Sorge, Roland and Formanek, Peter and Zaumseil, Peter and Schmeißer, Dieter}, title = {Ultrathin Dielectric Films Grown by Solid Phase Reaction of Pr with SiO2}, series = {MRS Proceedings}, volume = {811}, journal = {MRS Proceedings}, issn = {1946-4274}, pages = {D7.10.}, language = {en} } @misc{PerezMahadevaiahPerezBoschQuesadaetal., author = {Perez, Eduardo and Mahadevaiah, Mamathamba Kalishettyhalli and Perez-Bosch Quesada, Emilio and Wenger, Christian}, title = {In-depth characterization of switching dynamics in amorphous HfO2 memristive arrays for the implementation of synaptic updating rules}, series = {Japanese Journal of Applied Physics}, volume = {61}, journal = {Japanese Journal of Applied Physics}, issn = {0021-4922}, doi = {10.35848/1347-4065/ac6a3b}, pages = {1 -- 7}, abstract = {Accomplishing truly analog conductance modulation in memristive arrays is crucial in order to implement the synaptic plasticity in hardware-based neuromorphic systems. In this paper, such a feature was addressed by exploiting the inherent stochasticity of switching dynamics in amorphous HfO2 technology. A thorough statistical analysis of experimental characteristics measured in 4 kbit arrays by using trains of identical depression/potentiation pulses with different voltage amplitudes and pulse widths provided the key to develop two different updating rules and to define their optimal programming parameters. The first rule is based on applying a specific number of identical pulses until the conductance value achieves the desired level. The second one utilized only one single pulse with a particular amplitude to achieve the targeted conductance level. In addition, all the results provided by the statistical analysis performed may play an important role in understanding better the switching behavior of this particular technology.}, language = {en} } @misc{StrobelAlvaradoChavarinKnautetal., author = {Strobel, Carsten and Alvarado Chavarin, Carlos and Knaut, Martin and V{\"o}lkel, Sandra and Albert, Matthias and Hiess, Andre and Max, Benjamin and Wenger, Christian and Kirchner, Robert and Mikolajick, Thomas}, title = {High Gain Graphene Based Hot Electron Transistor with Record High Saturated Output Current Density}, series = {Advanced Electronic Materials}, volume = {10}, journal = {Advanced Electronic Materials}, number = {2}, issn = {2199-160X}, doi = {10.1002/aelm.202300624}, abstract = {Hot electron transistors (HETs) represent an exciting frontier in semiconductor technology, holding the promise of high-speed and high-frequency electronics. With the exploration of two-dimensional materials such as graphene and new device architectures, HETs are poised to revolutionize the landscape of modern electronics. This study highlights a novel HET structure with a record output current density of 800 A/cm² and a high current gain α, fabricated using a scalable fabrication approach. The HET structure comprises two-dimensional hexagonal boron nitride (hBN) and graphene layers wet transferred to a germanium substrate. The combination of these materials results in exceptional performance, particularly in terms of the highly saturated output current density. The scalable fabrication scheme used to produce the HET opens up opportunities for large-scale manufacturing. This breakthrough in HET technology holds promise for advanced electronic applications, offering high current capabilities in a practical and manufacturable device.}, language = {en} } @misc{PechmannPerezWengeretal., author = {Pechmann, Stefan and Perez, Eduardo and Wenger, Christian and Hagelauer, Amelie}, title = {A current mirror Based read circuit design with multi-level capability for resistive switching deviceb}, series = {2024 International Conference on Electronics, Information, and Communication (ICEIC)}, journal = {2024 International Conference on Electronics, Information, and Communication (ICEIC)}, publisher = {Institute of Electrical and Electronics Engineers (IEEE)}, isbn = {979-8-3503-7188-8}, issn = {2767-7699}, doi = {10.1109/ICEIC61013.2024.10457188}, pages = {4}, abstract = {This paper presents a read circuit design for resistive memory cells based on current mirrors. The circuit utilizes high-precision current mirrors and reference cells to determine the state of resistive memory using comparators. It offers a high degree in adaptability in terms of both resistance range and number of levels. Special emphasis was put on device protection to prevent accidental programming of the memory during read operations. The realized circuit can resolve eight states with a resolution of up to 1 k Ω, realizing a digitization of the analog memory information. Furthermore, the integration in a complete memory macro is shown. The circuit was realized in a 130 nm-process but can easily be adapted to other processes and resistive memory technologies.}, language = {en} } @misc{NitschRatzkePozarowskaetal., author = {Nitsch, Paul-G. and Ratzke, Markus and Pozarowska, Emilia and Flege, Jan Ingo and Alvarado Chavarin, Carlos and Wenger, Christian and Fischer, Inga Anita}, title = {Deposition of reduced ceria thin films by reactive magnetron sputtering for the development of a resistive gas sensor}, series = {Verhandlungen der DPG, Berlin 2024}, journal = {Verhandlungen der DPG, Berlin 2024}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {The use of cerium oxide for hydrogen sensing is limited by the low electrical conductivity of layers deposited from a ceria target. To increase the electrical conductivity, partially reduced cerium oxide layers were obtained from a metallic cerium target by reactive magnetron sputtering. The proportions of the oxidation states Ce3+, present in reduced species, and Ce4+, present in fully oxidized species, were determined by ex-situ XPS. For electrical characterization, films were deposited on planarized tungsten finger electrodes. IV curves were measured over several days to investigate possible influences of oxygen and humidity on electrical conductivity. The morphological stability of the layers under ambient conditions was investigated by microscopical methods. The XPS results show a significant amount of Ce3+ in the layers. The electrical conductivity of as-grown samples is several orders of magnitude higher than that of samples grown from a ceria target. However, the conductivity decreases over time, indicating an oxidation of the layers. The surface morphology of the samples was found to be changing drastically within days, leading to partial delamination.}, language = {en} } @misc{NikiruyPerezBaronietal., author = {Nikiruy, Kristina and Perez, Eduardo and Baroni, Andrea and Reddy, Keerthi Dorai Swamy and Pechmann, Stefan and Wenger, Christian and Ziegler, Martin}, title = {Blooming and pruning: learning from mistakes with memristive synapses}, series = {Scientific Reports}, volume = {14}, journal = {Scientific Reports}, number = {1}, issn = {2045-2322}, doi = {10.1038/s41598-024-57660-4}, abstract = {AbstractBlooming and pruning is one of the most important developmental mechanisms of the biological brain in the first years of life, enabling it to adapt its network structure to the demands of the environment. The mechanism is thought to be fundamental for the development of cognitive skills. Inspired by this, Chialvo and Bak proposed in 1999 a learning scheme that learns from mistakes by eliminating from the initial surplus of synaptic connections those that lead to an undesirable outcome. Here, this idea is implemented in a neuromorphic circuit scheme using CMOS integrated HfO2-based memristive devices. The implemented two-layer neural network learns in a self-organized manner without positive reinforcement and exploits the inherent variability of the memristive devices. This approach provides hardware, local, and energy-efficient learning. A combined experimental and simulation-based parameter study is presented to find the relevant system and device parameters leading to a compact and robust memristive neuromorphic circuit that can handle association tasks.}, language = {en} } @misc{StrobelAlvaradoChavarinLeszczynskietal., author = {Strobel, Carsten and Alvarado Chavarin, Carlos and Leszczynski, Sebastian and Richter, Karola and Knaut, Martin and Reif, Johanna and V{\"o}lkel, Sandra and Albert, Matthias and Wenger, Christian and Bartha, Johann Wolfgang and Mikolajick, Thomas}, title = {Improved Graphene-base Heterojunction Transistor with Different Collector Semi-conductors for High-frequency Applications}, series = {Advanced Materials Letters}, volume = {13}, journal = {Advanced Materials Letters}, number = {1}, issn = {0976-3961}, doi = {10.5185/amlett.2022.011688}, abstract = {A new kind of transistor device with a graphene monolayer embedded between two n-type silicon layers is fabricated and characterized. The device is called graphene-base heterojunction transistor (GBHT). The base-voltage controls the current of the device flowing from the emitter via graphene to the collector. The transit time for electrons passing by the ultrathin graphene layer is extremely short which makes the device very promising for high frequency RF-electronics. The output current of the device is saturated and clearly modulated by the base voltage. Further, the silicon collector of the GBHT is replaced by germanium to improve the device performance. This enabled the collector current to be increased by almost three orders of magnitude. Also, the common-emitter current gain (Ic/Ib) increased from 10-3 to approximately 0.3 for the newly designed device. However, the ON-OFF ratio of the improved germanium based GBHT has so far been rather low. Further optimizations are necessary in order to fully exploit the potential of the graphene-base heterojunction transistor.}, language = {en} } @misc{KloesBischoffLeiseetal., author = {Kloes, Alexander and Bischoff, Carl and Leise, Jakob and Perez-Bosch Quesada, Emilio and Wenger, Christian and Perez, Eduardo}, title = {Stochastic switching of memristors and consideration in circuit simulation}, series = {Solid State Electronics}, volume = {201}, journal = {Solid State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2023.108606}, abstract = {We explore the stochastic switching of oxide-based memristive devices by using the Stanford model for circuit simulation. From measurements, the device-to-device (D2D) and cycle-to-cycle (C2C) statistical variation is extracted. In the low-resistive state (LRS) dispersion by D2D variability is dominant. In the high-resistive state (HRS) C2C dispersion becomes the main source of fluctuation. A statistical procedure for the extraction of parameters of the compact model is presented. Thereby, in a circuit simulation the typical D2D and C2C fluctuations of the current-voltage (I-V) characteristics can be emulated by extracting statistical parameters of key model parameters. The statistical distributions of the parameters are used in a Monte Carlo simulation to reproduce the I-V D2D and C2C dispersions which show a good agreement to the measured curves. The results allow the simulation of the on/off current variation for the design of memory cells or can be used to emulate the synaptic behavior of these devices in artificial neural networks realized by a crossbar array of memristors.}, language = {en} } @misc{PrueferWengerBieretal., author = {Pr{\"u}fer, Mareike and Wenger, Christian and Bier, Frank F. and Laux, Eva-Maria and H{\"o}lzel, Ralph}, title = {Activity of AC electrokinetically immobilized horseradish peroxidase}, series = {Electrophoresis}, volume = {43}, journal = {Electrophoresis}, number = {18-19}, issn = {1522-2683}, doi = {10.1002/elps.202200073}, pages = {1920 -- 1933}, abstract = {Dielectrophoresis(DEP) is an AC electrokinetic effect mainly used to manipulate cells.Smaller particles,like virions,antibodies,enzymes,andevendyemolecules can be immobilized by DEP as well. In principle, it was shown that enzymesare active after immobilization by DEP, but no quantification of the retainedactivity was reported so far. In this study, the activity of the enzyme horseradishperoxidase (HRP) is quantified after immobilization by DEP. For this, HRP is immobilized on regular arrays of titanium nitride ring electrodes of 500 nm diameter and 20 nm widths. The activity of HRP on the electrode chip is measured with a limit of detection of 60 fg HRP by observing the enzymatic turnover of Amplex Red and H2O2 to fluorescent resoruf in by fluorescence microscopy. The initial activity of the permanently immobilized HRP equals up to 45\% of the activity that can be expected for an ideal monolayer of HRP molecules on all electrodes of the array. Localization of the immobilizate on the electrodesis accomplished by staining with the fluorescent product of the enzyme reac-tion.The high residual activity of enzymes after AC field induced immobilization shows the method's suitability for biosensing and research applications.}, language = {en} } @misc{OssorioVinuesaGarciaetal., author = {Ossorio, {\´O}scar G. and Vinuesa, Guillermo and Garcia, Hector and Sahelices, Benjamin and Duenas, Salvador and Castan, Helena and Perez, Eduardo and Mahadevaiah, Mamathamba Kalishettyhalli and Wenger, Christian}, title = {Performance Assessment of Amorphous HfO2-based RRAM Devices for Neuromorphic Applications}, series = {ECS Transactions}, volume = {102}, journal = {ECS Transactions}, number = {2}, issn = {1938-6737}, doi = {10.1149/10202.0029ecst}, pages = {29 -- 35}, abstract = {The use of thin layers of amorphous hafnium oxide has been shown to be suitable for the manufacture of Resistive Random-Access memories (RRAM). These memories are of great interest because of their simple structure and non-volatile character. They are particularly appealing as they are good candidates for substituting flash memories. In this work, the performance of the MIM structure that takes part of a 4 kbit memory array based on 1-transistor-1-resistance (1T1R) cells was studied in terms of control of intermediate states and cycle durability. DC and small signal experiments were carried out in order to fully characterize the devices, which presented excellent multilevel capabilities and resistive-switching behavior.}, language = {en} } @misc{BaroniGlukhovPerezetal., author = {Baroni, Andrea and Glukhov, Artem and Perez, Eduardo and Wenger, Christian and Calore, Enrico and Schifano, Sebastiano Fabio and Olivo, Piero and Ielmini, Daniele and Zambelli, Cristian}, title = {An energy-efficient in-memory computing architecture for survival data analysis based on resistive switching memories}, series = {Frontiers in Neuroscience}, volume = {Vol. 16}, journal = {Frontiers in Neuroscience}, issn = {1662-4548}, doi = {10.3389/fnins.2022.932270}, pages = {1 -- 16}, abstract = {One of the objectives fostered in medical science is the so-called precision medicine, which requires the analysis of a large amount of survival data from patients to deeply understand treatment options. Tools like Machine Learning and Deep Neural Networks are becoming a de-facto standard. Nowadays, computing facilities based on the Von Neumann architecture are devoted to these tasks, yet rapidly hitting a bottleneck in performance and energy efficiency. The In-Memory Computing (IMC) architecture emerged as a revolutionary approach to overcome that issue. In this work, we propose an IMC architecture based on Resistive switching memory (RRAM) crossbar arrays to provide a convenient primitive for matrix-vector multiplication in a single computational step. This opens massive performance improvement in the acceleration of a neural network that is frequently used in survival analysis of biomedical records, namely the DeepSurv. We explored how the synaptic weights mapping strategy and the programming algorithms developed to counter RRAM non-idealities expose a performance/energy trade-off. Finally, we assessed the benefits of the proposed architectures with respect to a GPU-based realization of the same task, evidencing a tenfold improvement in terms of performance and three orders of magnitude with respect to energy efficiency.}, language = {en} } @misc{PerezBoschQuesadaRomeroZalizPerezetal., author = {P{\´e}rez-Bosch Quesada, Emilio and Romero-Zaliz, Roc{\´i}o and Perez, Eduardo and Mahadevaiah, Mamathamba Kalishettyhalli and Reuben, John and Schubert, Markus Andreas and Jim{\´e}nez-Molinos, Francisco and Rold{\´a}n, Juan Bautista and Wenger, Christian}, title = {Toward Reliable Compact Modeling of Multilevel 1T-1R RRAM Devices for Neuromorphic Systems}, series = {Electronics (MDPI)}, volume = {10}, journal = {Electronics (MDPI)}, number = {6}, issn = {2079-9292}, doi = {10.3390/electronics10060645}, pages = {13}, abstract = {In this work, three different RRAM compact models implemented in Verilog-A are analyzed and evaluated in order to reproduce the multilevel approach based on the switching capability of experimental devices. These models are integrated in 1T-1R cells to control their analog behavior by means of the compliance current imposed by the NMOS select transistor. Four different resistance levels are simulated and assessed with experimental verification to account for their multilevel capability. Further, an Artificial Neural Network study is carried out to evaluate in a real scenario the viability of the multilevel approach under study.}, language = {en} } @misc{PetrykDykaPerezetal., author = {Petryk, Dmytro and Dyka, Zoya and Perez, Eduardo and Mahadevaiah, Mamathamba Kalishettyhalli and Kabin, Ievgen and Wenger, Christian and Langend{\"o}rfer, Peter}, title = {Evaluation of the Sensitivity of RRAM Cells to Optical Fault Injection Attacks}, series = {EUROMICRO Conference on Digital System Design (DSD 2020), Special Session: Architecture and Hardware for Security Applications (AHSA)}, journal = {EUROMICRO Conference on Digital System Design (DSD 2020), Special Session: Architecture and Hardware for Security Applications (AHSA)}, isbn = {978-1-7281-9535-3}, issn = {978-1-7281-9536-0}, doi = {10.1109/DSD51259.2020.00047}, pages = {8}, language = {en} } @misc{GlukhovLepriMiloetal., author = {Glukhov, Artem and Lepri, Nicola and Milo, Valerio and Baroni, Andrea and Zambelli, Cristian and Olivo, Piero and Perez, Eduardo and Wenger, Christian and Ielmini, Daniele}, title = {End-to-end modeling of variability-aware neural networks based on resistive-switching memory arrays}, series = {Proc. 30th IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SoC 2022)}, journal = {Proc. 30th IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SoC 2022)}, doi = {10.1109/VLSI-SoC54400.2022.9939653}, pages = {1 -- 5}, abstract = {Resistive-switching random access memory (RRAM) is a promising technology that enables advanced applications in the field of in-memory computing (IMC). By operating the memory array in the analogue domain, RRAM-based IMC architectures can dramatically improve the energy efficiency of deep neural networks (DNNs). However, achieving a high inference accuracy is challenged by significant variation of RRAM conductance levels, which can be compensated by (i) advanced programming techniques and (ii) variability-aware training (VAT) algorithms. In both cases, however, detailed knowledge and accurate physics-based statistical models of RRAM are needed to develop programming and VAT methodologies. This work presents an end-to-end approach to the development of highly-accurate IMC circuits with RRAM, encompassing the device modeling, the precise programming algorithm, and the VAT simulations to maximize the DNN classification accuracy in presence of conductance variations.}, language = {en} } @misc{PerezOssorioDuenasetal., author = {Perez, Eduardo and Ossorio, {\´O}scar G. and Duenas, Salvador and Castan, Helena and Garc{\´i}a, Hector and Wenger, Christian}, title = {Programming Pulse Width Assessment for Reliable and Low-Energy Endurance Performance in Al:HfO2-Based RRAM Arrays}, series = {Electronics (MDPI)}, volume = {9}, journal = {Electronics (MDPI)}, number = {5}, issn = {2079-9292}, doi = {10.3390/electronics9050864}, abstract = {A crucial step in order to achieve fast and low-energy switching operations in resistive random access memory (RRAM) memories is the reduction of the programming pulse width. In this study, the incremental step pulse with verify algorithm (ISPVA) was implemented by using different pulse widths between 10 μ s and 50 ns and assessed on Al-doped HfO 2 4 kbit RRAM memory arrays. The switching stability was assessed by means of an endurance test of 1k cycles. Both conductive levels and voltages needed for switching showed a remarkable good behavior along 1k reset/set cycles regardless the programming pulse width implemented. Nevertheless, the distributions of voltages as well as the amount of energy required to carry out the switching operations were definitely affected by the value of the pulse width. In addition, the data retention was evaluated after the endurance analysis by annealing the RRAM devices at 150 °C along 100 h. Just an almost negligible increase on the rate of degradation of about 1 μ A at the end of the 100 h of annealing was reported between those samples programmed by employing a pulse width of 10 μ s and those employing 50 ns. Finally, an endurance performance of 200k cycles without any degradation was achieved on 128 RRAM devices by using programming pulses of 100 ns width}, language = {en} } @misc{PetzoldPirosEilhardtetal., author = {Petzold, Stefan and Piros, Eszter and Eilhardt, Robert and Zintler, Alexander and Vogel, Tobias and Kaiser, Nico and Radetinac, Aldin and Komissinskiy, Philipp and Jalaguier, Eric and Nolot, Emmanuel and Charpin-Nicolle, Christelle and Wenger, Christian and Molina-Luna, Leopoldo and Miranda, Enrique and Alff, Lambert}, title = {Tailoring the Switching Dynamics in Yttrium Oxide-Based RRAM Devices by Oxygen Engineering: From Digital to Multi-Level Quantization toward Analog Switching}, series = {Advanced Electronic Materials}, volume = {6}, journal = {Advanced Electronic Materials}, number = {11}, issn = {2199-160X}, doi = {10.1002/aelm.202000439}, pages = {13}, abstract = {This work investigates the transition from digital to gradual or analog resistive switching in yttrium oxide-based resistive random-access memory devices. It is shown that this transition is determined by the amount of oxygen in the functional layer. A homogeneous reduction of the oxygen content not only reduces the electroforming voltage, allowing for forming-free devices, but also decreases the voltage operation window of switching, thereby reducing intra-device variability. The most important effect as the dielectric becomes substoichiometric by oxygen engineering is that more intermediate (quantized) conduction states are accessible. A key factor for this reproducibly controllable behavior is the reduced local heat dissipation in the filament region due to the increased thermal conductivity of the oxygen depleted layer. The improved accessibility of quantized resistance states results in a semi-gradual switching both for the set and reset processes, as strongly desired for multi-bit storage and for an accurate definition of the synaptic weights in neuromorphic systems. A theoretical model based on the physics of mesoscopic structures describing current transport through a nano-constriction including asymmetric potential drops at the electrodes and non-linear conductance quantization is provided. The results contribute to a deeper understanding on how to tailor materials properties for novel memristive functionalities.}, language = {en} } @misc{GlukhovMiloBaronietal., author = {Glukhov, Artem and Milo, Valerio and Baroni, Andrea and Lepri, Nicola and Zambelli, Cristian and Olivo, Piero and Perez, Eduardo and Wenger, Christian and Ielmini, Daniele}, title = {Statistical model of program/verify algorithms in resistive-switching memories for in-memory neural network accelerators}, series = {2022 IEEE International Reliability Physics Symposium (IRPS)}, journal = {2022 IEEE International Reliability Physics Symposium (IRPS)}, publisher = {Institute of Electrical and Electronics Engineers (IEEE)}, isbn = {978-1-6654-7950-9}, issn = {2473-2001}, doi = {10.1109/IRPS48227.2022.9764497}, pages = {3C.3-1 -- 3C.3-7}, abstract = {Resistive-switching random access memory (RRAM) is a promising technology for in-memory computing (IMC) to accelerate training and inference of deep neural networks (DNNs). This work presents the first physics-based statistical model describing (i) multilevel RRAM device program/verify (PV) algorithms by controlled set transition, (ii) the stochastic cycle-to-cycle (C2C) and device-to-device (D2D) variations within the array, and (iii) the impact of such imprecisions on the accuracy of DNN accelerators. The model can handle the full chain from RRAM materials/device parameters to the DNN performance, thus providing a valuable tool for device/circuit codesign of hardware DNN accelerators.}, language = {en} } @misc{PerezBoschQuesadaMahadevaiahRizzietal., author = {Perez-Bosch Quesada, Emilio and Mahadevaiah, Mamathamba Kalishettyhalli and Rizzi, Tommaso and Wen, Jianan and Ulbricht, Markus and Krstic, Milos and Wenger, Christian and Perez, Eduardo}, title = {Experimental Assessment of Multilevel RRAM-based Vector-Matrix Multiplication Operations for In-Memory Computing}, series = {IEEE Transactions on Electron Devices}, volume = {70}, journal = {IEEE Transactions on Electron Devices}, number = {4}, issn = {0018-9383}, doi = {10.1109/TED.2023.3244509}, pages = {2009 -- 2014}, abstract = {Resistive random access memory (RRAM)-based hardware accelerators are playing an important role in the implementation of in-memory computing (IMC) systems for artificial intelligence applications. The latter heavily rely on vector-matrix multiplication (VMM) operations that can be efficiently boosted by RRAM devices. However, the stochastic nature of the RRAM technology is still challenging real hardware implementations. To study the accuracy degradation of consecutive VMM operations, in this work we programed two RRAM subarrays composed of 8x8 one-transistor-one-resistor (1T1R) cells following two different distributions of conductive levels. We analyze their robustness against 1000 identical consecutive VMM operations and monitor the inherent devices' nonidealities along the test. We finally quantize the accuracy loss of the operations in the digital domain and consider the trade-offs between linearly distributing the resistive states of the RRAM cells and their robustness against nonidealities for future implementation of IMC hardware systems.}, language = {en} } @misc{PerezMaldonadoPerezBoschQuesadaetal., author = {Perez, Eduardo and Maldonado, David and Perez-Bosch Quesada, Emilio and Mahadevaiah, Mamathamba Kalishettyhalli and Jimenez-Molinos, Francisco and Wenger, Christian}, title = {Parameter Extraction Methods for Assessing Device-to-Device and Cycle-to-Cycle Variability of Memristive Devices at Wafer Scale}, series = {IEEE Transactions on Electron Devices}, volume = {70}, journal = {IEEE Transactions on Electron Devices}, number = {1}, issn = {0018-9383}, doi = {10.1109/TED.2022.3224886}, pages = {360 -- 365}, abstract = {The stochastic nature of the resistive switching (RS) process in memristive devices makes device-to-device (DTD) and cycle-to-cycle (CTC) variabilities relevant magnitudes to be quantified and modeled. To accomplish this aim, robust and reliable parameter extraction methods must be employed. In this work, four different extraction methods were used at the production level (over all the 108 devices integrated on 200-mm wafers manufactured in the IHP 130-nm CMOS technology) in order to obtain the corresponding collection of forming, reset, and set switching voltages. The statistical analysis of the experimental data (mean and standard deviation (SD) values) was plotted by using heat maps, which provide a good summary of the whole data at a glance and, in addition, an easy manner to detect inhomogeneities in the fabrication process.}, language = {en} }