@misc{WeberMuellerGruenbergetal., author = {Weber, Franziska and M{\"u}ller, Carsten and Gr{\"u}nberg, Christian and Thiel, Christian and Bahns, Carolin and Brannath, Werner and Dietrich, Freya and Dieter, Valerie and F{\"a}rber, Francesca and Gellert, Paul and Kloek, Corelien and Kloep, Stephan and Kopkow, Christian and Krauß, Inga and Rasche, Peter and Rothgang, Heinz and Veenhof, Cindy and Vollmar, Horst Christian and Peschke, Dirk}, title = {Smartphone-assistiertes Trainings- und Edukationsprogramm f{\"u}r Menschen mit H{\"u}ft- und/oder Kniearthrose (SmArt-E): Studienprotokoll f{\"u}r eine multizentrische, randomisierte, kontrollierte Studie}, series = {21. Deutscher Kongress f{\"u}r Versorgungsforschung (DKVF), 05.10. - 07.10.2022, Potsdam}, journal = {21. Deutscher Kongress f{\"u}r Versorgungsforschung (DKVF), 05.10. - 07.10.2022, Potsdam}, doi = {10.3205/22dkvf283}, url = {http://nbn-resolving.de/urn:nbn:de:0183-22dkvf2836}, language = {de} } @misc{WeberMuellerBahnsetal., author = {Weber, Franziska and M{\"u}ller, Carsten and Bahns, Carolin and Kopkow, Christian and F{\"a}rber, Francesca and Gellert, Paul and Otte, Ina and Vollmar, Horst Christian and Brannath, Werner and Diederich, Freya and Kloep, Stephan and Rothgang, Heinz and Dieter, Valerie and Krauß, Inga and Kloek, Corelien and Veenhof, Cindy and Collisi, Sandra and Repschl{\"a}ger, Ute and B{\"o}binger, Hannes and Gr{\"u}neberg, Christian and Thiel, Christian and Peschke, Dirk}, title = {Smartphone-assisted training with education for patients with hip and/or knee osteoarthritis (SmArt-E): study protocol for a multicentre pragmatic randomized controlled trial}, series = {BMC Musculoskeletal Disorders}, volume = {24}, journal = {BMC Musculoskeletal Disorders}, number = {1}, doi = {10.1186/s12891-023-06255-7}, abstract = {Hip and knee osteoarthritis are associated with functional limitations, pain and restrictions in quality of life and the ability to work. Furthermore, with growing prevalence, osteoarthritis is increasingly causing (in)direct costs. Guidelines recommend exercise therapy and education as primary treatment strategies. Available options for treatment based on physical activity promotion and lifestyle change are often insufficiently provided and used. In addition, the quality of current exercise programmes often does not meet the changing care needs of older people with comorbidities and exercise adherence is a challenge beyond personal physiotherapy. The main objective of this study is to investigate the short- and long-term (cost-)effectiveness of the SmArt-E programme in people with hip and/or knee osteoarthritis in terms of pain and physical functioning compared to usual care.}, language = {en} } @misc{KalettaWipfFraschkeetal., author = {Kaletta, Udo Christian and Wipf, Christian and Fraschke, Mirko and Wolansky, Dirk and Schubert, Markus Andreas and Schroeder, Thomas and Wenger, Christian}, title = {AlN/SiO2/Si3N4/Si(100) based CMOS compatible surface acoustic wave filter with -12.8 dB minimum insertion loss}, series = {IEEE Transactions on Electron Devices}, volume = {62}, journal = {IEEE Transactions on Electron Devices}, number = {3}, issn = {0018-9383}, doi = {10.1109/TED.2015.2395443}, pages = {764 -- 768}, language = {en} } @misc{BaalAllfofsEhrenbrusthoffetal., author = {Baal, Katharina van and Allfofs, Jana and Ehrenbrusthoff, Katja and Gr{\"u}neberg, Christian and Hering, Thomas and Kopkow, Christian and Thiel, Christian}, title = {Effects of a movement control and tactile acuity training in patients with nonspecific chronic low back pain and control impairment}, series = {BMC Musculoskeletal Disorders}, volume = {Vol. 21}, journal = {BMC Musculoskeletal Disorders}, issn = {1471-2474}, doi = {10.1186/s12891-020-03727-y}, pages = {17}, language = {en} } @misc{BertaudWalczykWalczyketal., author = {Bertaud, Thomas and Walczyk, Damian and Walczyk, Christian and Kubotsch, S. and Wenger, Christian and Schr{\"o}der, Thomas and Vall{\´e}e, Christophe and Gonon, P. and Mannequin, C. and Jousseaume, V. and Grampeix, Helen}, title = {Resistive Switching of HfO2-based MIM diodes: Impact of the Top Electrode Materials}, series = {Thin Solid Films}, volume = {520}, journal = {Thin Solid Films}, number = {14}, issn = {0040-6090}, pages = {4551 -- 4555}, language = {en} } @inproceedings{MinhasJuzekBergeretal., author = {Minhas, Sarfraz Ul-Haque and Juzek, Christian and Berger, Ulrich and Lehmann, Christian}, title = {Development of Intelligent Decision Support System Based on Unified Concept for Distributed Manufacturing Planning}, series = {7th IFAC Conference on Manufacturing Modelling, Management, and Control}, booktitle = {7th IFAC Conference on Manufacturing Modelling, Management, and Control}, editor = {Bakhtadze, Natalia and Chernyshov, Kirill and Dolgui, Alexandre and Lototsky, Vladimir}, doi = {10.3182/20130619-3-RU-3018.00351}, pages = {454 -- 459}, abstract = {The optimization processes in production planning often encounter problems due to unavailability of skilled workers in the concerned production departments since the decisions made in uncertain situations rely mainly on the knowledge possessed by the relevant planners. This paper further presents and elaborates the unified web-based knowledge based decision support system concept to automate and reuse implicit knowledge generated during interaction with the dedicated software tools as well as during interaction with real hardware setups in an industrial environment. The unified concept has been devised considering two pilot cases i.e. decision making on eco-efficient decentralized production schemes for manufacturing customized products and decision support for solving problems in ramp-up management process. This paper further discusses the development issues concerning web-based knowledge based decision support system to demonstrate the unified concept. The software modules from both pilot cases are validated considering two pilot cases.}, language = {en} } @misc{BertaudWalczykSowinskaetal., author = {Bertaud, Thomas and Walczyk, Damian and Sowinska, Małgorzata and Wolansky, Dirk and Tillack, Bernd and Schoof, Gunther and Korolevych, R. and Wenger, Christian and Thiess, Sebastian and Schroeder, Thomas and Walczyk, Christian}, title = {HfO2-based RRAM for Embedded Nonvolatile Memory: From Materials Science to Integrated 1T1R RRAM Arrays}, series = {ECS transactions}, volume = {50}, journal = {ECS transactions}, number = {4}, issn = {1938-6737}, pages = {21 -- 26}, language = {en} } @misc{SchubertCordes, author = {Schubert, Christian and Cordes, Christian}, title = {Role Models that make you unhappy: Light Paternalism, Social Learning and Welfare}, series = {Journal of Institutional Economics}, volume = {9}, journal = {Journal of Institutional Economics}, number = {2}, issn = {1744-1382}, doi = {10.1017/S1744137413000015}, pages = {131 -- 159}, language = {en} } @misc{SchubertCordes, author = {Schubert, Christian and Cordes, Christian}, title = {Toward a Naturalistic Foundation of the Social Contract}, series = {Constitutional Political Economy}, volume = {18}, journal = {Constitutional Political Economy}, number = {1}, issn = {1572-9966}, doi = {10.1007/s10602-006-9011-z}, pages = {35 -- 62}, language = {en} } @misc{LangaDrabeKunathetal., author = {Langa, Sergiu and Drabe, Christian and Kunath, Christian and Dreyhaupt, Andr{\´e} and Schenk, Harald}, title = {Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, journal = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9385-9}, doi = {10.1117/12.2003525}, pages = {86140F-1 -- 86140F-8}, language = {en} } @misc{WetterPfisterWerneretal., author = {Wetter, Oliver and Pfister, Christian and Werner, Johannes P. and Zorita, Eduardo and Wagner, Sebastian and Seneviratne, Sonia I. and Herget, J{\"u}rgen and Gr{\"u}newald, Uwe and Luterbacher, J{\"u}rg and Alcoforado, Maria Jo{\~a}o and Barriendos, Mariano and Bieber, Ursula and Br{\´a}zdil, Rudolf and Burmeister, Karl H. and Camenisch, Chantal and Contino, Antonio and Dobrovoln{\´y}, Petr and Glaser, R{\"u}diger and Himmelsbach, Iso and Kiss, Andrea and Kotyza, Oldřich and Labb{\´e}, Thomas and Liman{\´o}wka, Danuta and Litzenburger, Laurent and Nordl, {\O}yvind and Pribyl, Kathleen and Rets{\"o}, Dag and Riemann, Dirk and Rohr, Christian and Siegfried, Werner and S{\"o}derberg, Johan and Spring, Jean-Laurent}, title = {The year-long unprecedented European heat and drought of 1540 - a worst case}, series = {Climatic change}, volume = {125}, journal = {Climatic change}, number = {3-4}, issn = {1573-1480}, doi = {10.1007/s10584-014-1184-2}, pages = {349 -- 363}, abstract = {The heat waves of 2003 in Western Europe and 2010 in Russia, commonly labelled as rare climatic anomalies outside of previous experience, are often taken as harbingers of more frequent ex-tremes in the global warming-influenced future. However, a recent reconstruction of spring-summer temperatures for WE resulted in the likelihood of significantly higher temperatures in 1540. In order to check the plausibility of this result we investigated the severity of the 1540 drought by putting forward the argument of the known soil desiccation-temperature feedback. Based on more than 300 first-hand documentary weather report sources originating from an area of 2 to 3 million km2, we show that Europe was affected by an unprecedented 11-month-long Megadrought. The estimated number of precipitation days and precipitation amount for Central and Western Europe in 1540 is significantly lower than the 100-year minima of the in-strumental measurement period for spring, summer and autumn. This result is supported by independent documentary evidence about extremely low river flows and Europe-wide wild-, forestand settlement fires. We found that an event of this severity cannot be simulated by state-of-the-art climate models.}, language = {en} } @misc{PfisterWetterBrazdiletal., author = {Pfister, Christian and Wetter, Oliver and Br{\´a}zdil, Rudolf and Dobrovoln{\´y}, Petr and Glaser, R{\"u}diger and Luterbacher, J{\"u}rg and Seneviratne, Sonia I. and Zorita, Eduardo and Alcoforado, Maria Jo{\~a}o and Barriendos, Mariano and Bieber, Ursula and Burmeister, Karl H. and Camenisch, Chantal and Contino, Antonio and Gr{\"u}newald, Uwe and Herget, J{\"u}rgen and Himmelsbach, Iso and Labb{\´e}, Thomas and Liman{\´o}wka, Danuta and Litzenburger, Laurent and Kiss, Andrea and Kotyza, Oldřich and Nordl, {\O}yvind and Pribyl, Kathleen and Rets{\"o}, Dag and Riemann, Dirk and Rohr, Christian and Siegfried, Werner and Spring, Jean-Laurent and S{\"o}derberg, Johan and Wagner, Sebastian and Werner, Johannes P.}, title = {Tree-rings and people - different views on the 1540 Megadrought. Reply to B{\"u}ntgen et al. 2015}, series = {Climatic change}, volume = {131}, journal = {Climatic change}, number = {2}, issn = {0165-0009}, doi = {10.1007/s10584-015-1429-8}, pages = {191 -- 198}, language = {en} } @misc{BrinkmannOberrathAwakowiczetal., author = {Brinkmann, Ralf Peter and Oberrath, Jens and Awakowicz, Peter and Lapke, Martin and Musch, Thomas and Mussenbrock, Thomas and Rolfes, Ilona and Schulz, Christian and Storch, Robert and Styrnoll, Tim and Zietz, Christian}, title = {Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma}, language = {en} } @techreport{GaehrsAretzFlauteetal., author = {G{\"a}hrs, Swantje and Aretz, Astrid and Flaute, Markus and Oberst, Christian A. and Großmann, Anett and Lutz, Christian and Bargende, Daniel and Hirschl, Bernd and Madlener, Reinhard}, title = {Prosumer-Haushalte: Handlungsempfehlungen f{\"u}r eine sozial-{\"o}kologische und systemdienliche F{\"o}rderpolitik}, address = {Aachen, Berlin, Osnabr{\"u}ck}, pages = {15}, abstract = {Im Projekt „Prosumer-Haushalte - Private Haushalte als neue Schl{\"u}sselakteure einer Transformation des Energiesystems" wurden Thesen entwickelt, die das Potenzial und die M{\"o}glichkeiten von Prosumer-Haushalten unter {\"o}kologischen, {\"o}konomischen, sozialen und technischen Aspekten beleuchten. Diese Thesen wurden durch Arbeiten im Rahmen des Projektes gepr{\"u}ft und durch weitere wissenschaftliche Ergebnisse erg{\"a}nzt. Darauf aufbauend wurden die vorliegenden Handlungsempfehlungen f{\"u}r Rahmenbedingungen entwickelt, die einerseits dabei helfen sollen, das Prosumer-Potenzial zu heben und andererseits den Systemnutzen der Prosumer zu st{\"a}rken. Dabei k{\"o}nnen sowohl politische Maßnahmen und Instrumente zur Regulierung eine Rolle spielen als auch Marktmechanismen, die jeweils eine Transformation des Energiesystems herbeif{\"u}hren bzw. beschleunigen k{\"o}nnen. Bei der Erarbeitung von Handlungsempfehlungen wurde auch der Konflikt zwischen Klimaschutzzielen und sozialen Zielen deutlich.}, language = {de} } @techreport{SchmittBorckHentscheletal., author = {Schmitt, Randolf and Borck, Christian and Hentschel, Christian and Berger, Ulrich}, title = {Lightweight digital shadow concept for batch size one products and modular shopfloors}, doi = {10.26127/BTUOpen-5220}, pages = {4}, abstract = {The Digital Twin is seen as the step towards digitalization in many areas, including the area of manufacturing which is the focus of this paper. However, the frequently application-oriented development of concepts and initial implementations make it difficult to adapt them to other applications. Especially when production deviates from the usual highly automated processes and requires high flexibility, e.g. to allow batch size one. In such a case, the Digital Twin must support modular shopfloors with flexible areas in which different production times and various tools and machines are used. It should also be possible to react promptly to problems in production. Design errors that only become apparent during production must be reported directly. In order to deal with this problem, the paper presents a concept for an abstract representation of a Digital Shadow (DS). The DS combines the disciplines of production planning and control, product lifecycle and layout planning which creates new links and enables further application scenarios. Based on this Digital Shadow, different applications can be realized that provide user-related solutions. For this purpose, a tree structure is used that links information about the product and the production environment which in this case is variable.}, language = {en} } @misc{PerezMaldonadoAcaletal., author = {P{\´e}rez, Eduardo and Maldonado, David and Acal, Christian and Ruiz-Castro, Juan Eloy and Aguilera, Ana Mar{\´i}a and Jimenez-Molinos, Francisco and Roldan, Juan Bautista and Wenger, Christian}, title = {Advanced Temperature Dependent Statistical Analysis of Forming Voltage Distributions for Three Different HfO2-Based RRAM Technologies}, series = {Solid State Electronics}, volume = {176}, journal = {Solid State Electronics}, issn = {0038-1101}, pages = {6}, abstract = {In this work, voltage distributions of forming operations are analyzed by using an advanced statistical approach based on phase-type distributions (PHD). The experimental data were collected from batches of 128 HfO2-based RRAM devices integrated in 4-kbit arrays. Three di erent switching oxides, namely, polycrystalline HfO2, amorphous HfO2, and Al-doped HfO2, were tested in the temperature range from -40 to 150 oC. The variability of forming voltages has been usually studied by using the Weibull distribution (WD). However, the performance of the PHD analysis demonstrated its ability to better model this crucial operation. The capacity of the PHD to reproduce the experimental data has been validated by means of the Kolmogorov-Smirnov test, while the WD failed in many of the cases studied. In addition, PHD allows to extract information about intermediate probabilistic states that occur in the forming process and the transition probabilities between them; in this manner, we can deepen on the conductive lament formation physics. In particular, the number of intermediate states can be related to the device variability.}, language = {en} } @misc{BorckSchmittBergeretal., author = {Borck, Christian and Schmitt, Randolf and Berger, Ulrich and Hentschel, Christian}, title = {Development of a IIoT Platform for Industrial Imaging Sensors}, series = {Towards Sustainable Customization: Bridging Smart Products and Manufacturing Systems. Proceedings of the 8th Changeable, Agile, Reconfigurable and Virtual Production Conference (CARV2021) and the 10th World Mass Customization \& Personalization Conference (MCPC2021), Aalborg, Denmark, October/November 2021}, journal = {Towards Sustainable Customization: Bridging Smart Products and Manufacturing Systems. Proceedings of the 8th Changeable, Agile, Reconfigurable and Virtual Production Conference (CARV2021) and the 10th World Mass Customization \& Personalization Conference (MCPC2021), Aalborg, Denmark, October/November 2021}, editor = {Andersen, Ann-Louise and Andersen, Rasmus and Brunoe, Thomas Ditlev and Stoettrup Schioenning Larsen, Maria and Nielsen, Kjeld and Napoleone, Alessia and Kjeldgaard, Stefan}, publisher = {Springer}, address = {Cham}, isbn = {978-3-030-90699-3}, doi = {10.1007/978-3-030-90700-6_37}, pages = {330 -- 338}, abstract = {In the industry, connecting machines and tools - also known as the industrial Internet of things (IIoT) - is an essential part of the digital transformation of a company. The aim is to increase the efficiency and predictability of complex processes. In manual and semi-automatic processes, imaging sensors can help to monitor conditions, gives automated feedbacks to a central system, and e.g. provide current information for a digital twin. However, when imaging sensors are integrated into established IIoT platforms, they quickly reach their system limits due to the multidimensionality and high update and data rates. This paper presents a software platform that enables decoupled automated image processing through the abstraction and contextualization of the sensor technology and its data as well as a plugin architecture. Analogous to edge computing, partial processing can already be performed close to the sensor node to condensate data and reduce network loads and latencies. Thereby, all these approaches increase the longevity, flexibility and scalability of multi-sensor systems and associated processing algorithms. Based on the generic structure of the sensor network, the user is provided with an intuitive user interface that is based on IIoT platforms and enables the integration of their processing pipelines even for non-experts, despite the high complexity of the data.}, language = {en} } @techreport{ThonickeRahnerArnethetal., author = {Thonicke, Kirsten and Rahner, Eva and Arneth, Almut and Bartkowski, Bartosz and Bonn, Aletta and D{\"o}hler, Christian and Finger, Robert and Freitag, Jens and Grosch, Rita and Grossart, Hans-Peter and Gr{\"u}tzmacher, Kim and Hartman Scholz, Amber and H{\"a}user, Christoph and Hickler, Thomas and H{\"o}lker, Franz and J{\"a}hnig, Sonja C. and Jeschke, Jonathan and Kassen, Rees and Kastner, Thomas and Kramer-Schadt, Stephanie and Krug, Cornelia and Lakner, Sebastian and Loft, Lasse and Matzdorf, Bettina and Meakins, Felicity and De Meester, Luc and Monaghan, Michael T. and M{\"u}ller, Daniel and Overmann, J{\"o}rg and Quaas, Martin and Radchuk, Viktoriia and Reyer, Christopher and Roos, Christian and Scholz, Imme and Schroer, Sibylle and Sioen, Giles Bruno and Sommer, Simone and Sommerwerk, Nike and Tockner, Klement and Turk, Zachary and Warner, Barbara and W{\"a}tzold, Frank and Wende, Wolfgang and Veenstra, Tonjes and Voort, Hein van de}, title = {10 Must-Knows aus der Biodiversit{\"a}tsforschung}, publisher = {Potsdam-Institut f{\"u}r Klimafolgenforschung e.V. (PIK)}, address = {Potsdam}, doi = {10.5281/zenodo.6257476}, pages = {58}, language = {de} } @misc{MaiMarschmeyerPeczeketal., author = {Mai, Christian and Marschmeyer, Steffen and Peczek, Anna and Kroh, Aleksandra and Jose, Josmy and Reiter, Sebastian and Fischer, Inga Anita and Wenger, Christian and Mai, Andreas}, title = {Integration Aspects of Plasmonic TiN-based Nano-Hole-Arrays on Ge Photodetectorsin a 200mm Wafer CMOS Compatible Silicon Technology}, series = {ECS Transactions}, volume = {109}, journal = {ECS Transactions}, number = {4}, issn = {1938-5862}, doi = {10.1149/10904.0035ecst}, pages = {35 -- 46}, abstract = {In this work we present the progress in regard to the integration of a surface plasmon resonance refractive index sensor into a CMOS compatible 200 mm wafer silicon-based technology. Our approach pursues the combination of germanium photodetectors with metallic nanohole arrays. The paper is focused on the technology development to fabricate large area photodetectors based on a modern design concept. In a first iteration we achieved a leakage current density of 82 mA/cm2 at reverse bias of 0.5 V and a maximum optical responsivity of 0.103 A/W measured with TE polarized light at λ = 1310 nm and a reversed bias of 1 V. For the realization of nanohole arrays we used thin Titanium nitride (TiN) layers deposited by a sputtering process. We were able to produce very homogenous TiN layers with a thickness deviation of around 10 \% and RMS of 1.413 nm for 150 nm thick TiN layers.}, language = {en} } @incollection{BorckSchmittBergeretal., author = {Borck, Christian and Schmitt, Randolf and Berger, Ulrich and Hentschel, Christian}, title = {IIoT and Smart Sensors in Human-Centered Manufacturing}, series = {The Future of Smart Production for SMEs}, booktitle = {The Future of Smart Production for SMEs}, publisher = {Springer Nature Switzerland AG}, address = {Schweiz}, isbn = {978-3-031-15427-0}, doi = {10.1007/978-3-031-15428-7_18}, pages = {213 -- 224}, abstract = {Borck et al. evaluate the challenges and opportunities of Industrial Internet of Things (IIoT) and smart sensors in human-centered manufacturing. Particularly in small and medium-sized manufacturing with fewer machines and smart tools, it is significantly more difficult to automate processes and get the required information from the shop floor. Therefore, they give proven recommendations for the use of sensors based on a set of frequently occurring tasks in assembly, maintenance and logistics to achieve the support of smart data models in the context of Industry 4.0. "IIoT and smart sensors in human-centered manufacturing" concludes with concrete sample scenarios and describe the challenges and one solution using smart sensors and data models.}, language = {en} } @misc{ReiterSenguelMaietal., author = {Reiter, Sebastian and Seng{\"u}l, Akant and Mai, Christian and Spirito, Davide and Wenger, Christian and Fischer, Inga Anita}, title = {On-chip refractive index sensors based on plasmonic TiN Nanohole Arrays}, series = {2024 IEEE Silicon Photonics Conference (SiPhotonics)}, journal = {2024 IEEE Silicon Photonics Conference (SiPhotonics)}, isbn = {979-8-3503-9404-7}, issn = {1949-209X}, doi = {10.1109/SiPhotonics60897.2024.10544048}, pages = {2}, language = {de} } @misc{JoseMaiWengeretal., author = {Jose, Josmy and Mai, Christian and Wenger, Christian and Fischer, Inga Anita}, title = {Integration concept of plasmonic TiN nanohole arrays in a 200 mm BiCMOS Si technology for refractive index sensor applications}, series = {iCCC2024 - iCampµs Cottbus Conference}, journal = {iCCC2024 - iCampµs Cottbus Conference}, doi = {10.5162/iCCC2024/7.2}, pages = {96 -- 99}, language = {de} } @misc{MaiPeczekKrohetal., author = {Mai, Christian and Peczek, Anna and Kroh, Aleksandra and Jose, Josmy and Reiter, Sebastian and Wenger, Christian and Fischer, Inga Anita}, title = {Towards a CMOS compatible refractive index sensor: cointegration of TiN nanohole arrays and Ge photodetectors in a 200 mm wafer silicon technology}, series = {Optics Express}, volume = {32}, journal = {Optics Express}, number = {17}, publisher = {Optica Publishing Group}, issn = {1094-4087}, doi = {10.1364/OE.530081}, pages = {29099 -- 29111}, abstract = {In this work, we present the monolithic integration of a TiN nanohole array and a Ge photodetector towards a CMOS compatible fabrication of a refractive index sensor in a 200 mm wafer silicon technology. We developed a technology process that enables fabrication with high yields of around 90\%. Ge photodetectors with a Ge layer thickness of 450 nm and an area of 1600 µm2 (40 µm x 40 µm) show dark current densities of around 129 mA/cm2 and responsivities of 0.114 A/W measured by top illumination (TE polarization; λ = 1310 nm; angle of incidence = 14 °) at a reverse bias of 1 V. Nanohole arrays were structured in a 150 nm thick TiN layer. They were integrated into the back end of line and placed spatially close to the Ge photodetectors. After the metallization, passivation, and pad opening, the nanohole arrays were released with the help of an amorphous silicon stop layer. A significant impact of the TiN nanohole arrays on the optical behavior of the photodetector could be proven on the wafer level. Photocurrent measurements by top illumination confirm a strong dependence of optical properties on the polarization of the incident light and the nanohole array design. We demonstrate very stable photocurrents on the wafer level with a standard deviation of σ \< 6\%.}, language = {en} }