@inproceedings{LinZhuangWodnickietal., author = {Lin, Der-Song and Zhuang, Xuefeng and Wodnicki, Robert and Woychik, Charles. G. and Oralkan, {\"O}mer and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Packaging of large and low-pitch size 2D ultrasonic transducer arrays}, series = {IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010}, booktitle = {IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-424-45761-8}, pages = {508 -- 511}, language = {en} }