@inproceedings{SandnerKimmeGrashoffetal., author = {Sandner, Thilo and Kimme, S. and Grashoff, Thomas and Todt, U. and Graf, A. and Schenk, Harald and Tulea, C. and Lenenbach, A.}, title = {Micro-scanning mirrors for high-power laser applications in laser surgery}, series = {International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan}, booktitle = {International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-1512-5}, pages = {83 -- 84}, abstract = {We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.}, language = {en} }