@misc{LeeParkKupniketal., author = {Lee, Hyunjoo J. and Park, Kwan Kyu and Kupnik, Mario and Oralkan, {\"O}mer and Khuri-Yakub, Butrus T.}, title = {Chemical vapor detection using a capacitive micromachined ultrasonic transducer}, series = {Analytical chemistry}, volume = {83}, journal = {Analytical chemistry}, number = {24}, issn = {1520-6882}, doi = {10.1021/ac201626b}, pages = {9314 -- 9320}, language = {en} } @misc{SariogluKupnikVaithilingametal., author = {Sarioglu, Ali Fatih and Kupnik, Mario and Vaithilingam, Srikant and Khuri-Yakub, Butrus T.}, title = {Nanoscale topography of thermally-grown oxide films at right-angled convex corners of silicon}, series = {Journal of The Electrochemical Society}, volume = {159}, journal = {Journal of The Electrochemical Society}, number = {2}, issn = {0013-4651}, doi = {10.1149/2.005202jes}, pages = {79 -- 84}, language = {en} } @misc{ParkLeeKupniketal., author = {Park, Kwan Kyu and Lee, Hyunjoo J. and Kupnik, Mario and Oralkan, {\"O}mer and Ramseyer, Jean-Pierre and Lang, Hans Peter and Hegner, Martin and Gerber, Christoph and Khuri-Yakub, Butrus T.}, title = {Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection}, series = {Sensors and Actuators B: Chemical}, volume = {160}, journal = {Sensors and Actuators B: Chemical}, number = {1}, issn = {0925-4005}, doi = {10.1016/j.snb.2011.09.036}, pages = {1120 -- 1127}, language = {en} } @misc{ParkLeeKupniketal., author = {Park, Kwan Kyu and Lee, Hyunjoo J. and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding}, series = {Journal of Microelectromechanical Systems}, volume = {20}, journal = {Journal of Microelectromechanical Systems}, number = {1}, issn = {1941-0158}, doi = {10.1109/JMEMS.2010.2093567}, pages = {95 -- 103}, language = {en} } @inproceedings{KupnikHoVaithilingametal., author = {Kupnik, Mario and Ho, Min-Chieh and Vaithilingam, Srikant and Khuri-Yakub, Butrus T.}, title = {CMUTs for air coupled ultrasound with improved bandwidth}, series = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, booktitle = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-1252-4}, pages = {592 -- 595}, language = {en} } @inproceedings{HoKupnikVaithilingametal., author = {Ho, Min-Chieh and Kupnik, Mario and Vaithilingam, Srikant and Khuri-Yakub, Butrus T.}, title = {Fabrication and model validation for CMUTs operated in permanent contact mode}, series = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, booktitle = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-1252-4}, pages = {1016 -- 1019}, language = {en} } @inproceedings{ApteVaithilingamSariogluetal., author = {Apte, Nikhil and Vaithilingam, Srikant and Sarioglu, Ali Fatih and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Large area 1D CMUT phased arrays for multi-modality ultrasound imaging}, series = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, booktitle = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-1252-4}, pages = {612 -- 615}, language = {en} } @misc{KupnikKhuriYakub, author = {Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {High-temperature electrostatic transducers and fabrication method}, language = {en} } @misc{KupnikKhuriYakub, author = {Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Monolithic integrated CMUTs fabricated by low temperature wafer bonding}, language = {en} } @misc{KupnikKhuriYakub, author = {Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Direct wafer-bonded 2D CMUT array}, language = {en} }