@misc{EhrigKaiserSchenketal., author = {Ehrig, Lutz and Kaiser, Bert and Schenk, Hermann and Stolz, Michael and Langa, Sergiu and Conrad, Holger and Schenk, Harald and M{\"a}nnchen, Andreas and Brocks, Tobias}, title = {Acoustic validation of electrostatic all-silicon MEMS-speakers}, series = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, journal = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, doi = {10.17743/aesconf.2019.978-1-942220-29-9}, language = {en} }