@incollection{HirtBleckBobzinetal., author = {Hirt, Gerhard and Bleck, Wolfgang and Bobzin, Kirsten and B{\"u}hrig-Polaczek, Andreas and Bambach, Markus and Brecher, Christian}, title = {Hybrid Production Systems}, series = {Integrative Production Technology for High-Wage Countries}, booktitle = {Integrative Production Technology for High-Wage Countries}, editor = {Brecher, Christian}, publisher = {Springer Verlag}, address = {Berlin ; Heidelberg}, isbn = {978-3-642-21066-2}, pages = {435 -- 696}, language = {en} } @misc{BobzinBagcivanTheissetal., author = {Bobzin, Kirsten and Bagcivan, Nazlim and Theiß, Sebastian and Trieschmann, Jan and Brugnara, Ricardo Henrique and Preissing, Sven and Hecimovic, Ante}, title = {Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties}, series = {Journal of Vacuum Science \& Technology A}, volume = {32}, journal = {Journal of Vacuum Science \& Technology A}, number = {2}, issn = {1520-8559}, doi = {10.1116/1.4865917}, pages = {021513}, language = {en} }