@misc{SchmeisserHenkelBergholzetal., author = {Schmeißer, Dieter and Henkel, Karsten and Bergholz, Matthias and Tallarida, Massimo}, title = {The band gab and band offset in ultrathin oxide-semiconductor heterostructures}, language = {en} } @inproceedings{HenkelBurkovBergholzetal., author = {Henkel, Karsten and Burkov, Yevgen and Bergholz, Matthias and Karavaev, Konstantin and Sohal, Rakesh and Torche, Mohamed and Schmeißer, Dieter}, title = {Al-Oxynitride as a buffer layer for high-k dielectrics}, series = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin)}, pages = {161 -- 162}, language = {en} } @inproceedings{BergholzSchmeisser, author = {Bergholz, Matthias and Schmeißer, Dieter}, title = {Band gap determination of thin Praseodymiumoxide layers on Aluminiumoxynitride films}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 243}, abstract = {High-k dielectrics are important as never bevore in semiconductor industry. We investigate Pr2O3 as one representative of this group on Silicon and Silicon-Aluminium oxynitride substrates. In earlier work we observed the positive influence of this AlOxNy intermediate layer on the electrical properties of the Pr2O3 layer. Now we present in-situ EELS, XPS and UPS measurements of gradually grown thin Pr2O3 on AlOxNy. From these measurements we determine the band structure and find a very fast change of the band gap for the first few {\AA}ngstr{\"o}m, coupled with n-type behaviour for the Pr2O3 film. These results are compared with RIXS measurements of a 5 nm Pr2O3 on a 1 nm thick AlOxNy layer.}, language = {en} } @inproceedings{BergholzSohalSchmeisser, author = {Bergholz, Matthias and Sohal, Rakesh and Schmeißer, Dieter}, title = {ELS to determine the band gap of thin dielectric layers}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 156}, abstract = {In ultra thin layers of high-K materials the value of the band gap can be derived not explicitly although it is a key quantity in the electric behavior. We use ELS with a monochromatized (50 meV - 150 meV) electron gun and primary energies between 20 eV and 30 eV. Starting with the native SiO2/Si(001) layers we find that loss function of the substrate dominates for using primary energies beyond 50 eV. In contrast at energies below 50 eV the loss intensity can be used to derived the band gap with an accuracy of ±200 meV. We compare thin (<3 nm) films of HfOx, Pr2O3,Al2O3 and Si-Oxynitrides and discuss the band gap values as well as the scattered intensity observed within the gap.}, language = {en} } @phdthesis{Bergholz, author = {Bergholz, Matthias}, title = {Vergleich relevanter Parameter von Multipixelsensoren f{\"u}r Spurdetektoren nach Bestrahlung mit hohen Proton- und Neutronfl{\"u}ssen}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:co1-opus4-36359}, language = {de} }