@inproceedings{TortschanoffBaumgartFranketal., author = {Tortschanoff, Andreas and Baumgart, M. and Frank, A. and Wildenhain, Michael and Sandner, Thilo and Schenk, Harald and Kenda, Andreas}, title = {Optical position feedback for electrostatically driven MOEMS-scanners}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {82520S-1 -- 82520S-8}, language = {en} }