@article{BieniekBeckJakubowskietal., author = {Bieniek, Tomasz and Beck, Romuald B. and Jakubowski, Andrzej and Konarski, Piotr and Cwil, M. and Hoffmann, Patrick and Schmeißer, Dieter}, title = {Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation}, language = {en} } @article{BeckHoffmannSchmeisseretal., author = {Beck, Romuald B. and Hoffmann, Patrick and Schmeißer, Dieter and Bieniek, Tomasz and Jakubowski, Andrzej}, title = {Composition and Electrical Properties of Ultra-Thin SiOxNy Layers Formed by rf Plasma Nitrogen Implantation/Plasma Oxidation Processes}, language = {en} } @article{BieniekBeckJakubowskietal., author = {Bieniek, Tomasz and Beck, Romuald B. and Jakubowski, Andrzej and Hoffmann, Patrick and Schmeißer, Dieter and Konarski, Piotr and Cwil, M.}, title = {Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor}, language = {en} }