@misc{WallSchenkSchenketal., author = {Wall, F. and Schenk, Hermann and Schenk, Harald and Melnikov, A. and Ehrig, L. and Kaiser, B.}, title = {P31 - Optimization of Harmonic Distortions for Electrostatic MEMS Push-Pull NED-Microspeakers}, series = {iCCC2024 - iCampµs Cottbus Conference 2024-05-14 - 2024-05-16 Cottbus : Poster}, journal = {iCCC2024 - iCampµs Cottbus Conference 2024-05-14 - 2024-05-16 Cottbus : Poster}, publisher = {AMA Service GmbH, Von-M{\"u}nchhausen-Str. 49, 31515 Wunstorf, Germany}, isbn = {978-3-910600-00-3}, doi = {10.5162/iCCC2024/P31}, pages = {218 -- 221}, language = {en} }