@inproceedings{HeroldAcker2019, author = {Steven Herold and J{\"o}rg Acker}, title = {The influence of lattice deformations on the etch rates of potassium hydroxide on silicon}, booktitle = {9th European Silicon Days, 9-12 September 2018, Saarbr{\"u}cken, Germany, Book of abstracts}, editor = {David Scheschkewitz and Guido Kickelbick}, pages = {S. 198}, year = {2019}, }