@inproceedings{SchoenekerlAcker2019, author = {Stefan Sch{\"o}nekerl and J{\"o}rg Acker}, title = {Behavior of electroless copper deposition onto multi-crystalline silicon in diluted hydrofluoric acid solutions}, booktitle = {9th European Silicon Days, 9-12 September 2018, Saarbr{\"u}cken, Germany, Book of abstracts}, editor = {David Scheschkewitz and Guido Kickelbick}, pages = {S. 82}, year = {2019}, }