@misc{HeroldAcker2019, author = {Steven Herold and J{\"o}rg Acker}, title = {Analysis of the strain dependent acidic etch rate on diamond wire sawn silicon wafer}, booktitle = {7th Dresden Nanoanalysis Symposium : "Nano-scale characterization for cutting-edge materials research and sustainable materials development", Abstract booklet}, editor = {Ehrenfried Zschech}, url = {https://www.nanoanalytik.fraunhofer.de/content/dam/nanoanalytik/de/documents/7th_Dresden_Nanoanalysis_Symposium_abstracts.pdf}, institution = {FG Physikalische Chemie}, type = {conferenceobject_noref}, pages = {46}, year = {2019}, }