@misc{MeinelKoschwitzBlocksetal.2017, author = {Birgit Meinel and Tim Koschwitz and Christian Blocks and J{\"o}rg Acker}, title = {Comparison of diamond wire cut and silicon carbide slurry processed silicon wafer surfaces after acidic texturisation}, booktitle = {Materials Science in Semiconductor Processing}, volume = {26}, issn = {1369-8001}, doi = {10.1016/j.mssp.2014.03.046}, url = {http://www.sciencedirect.com/science/article/pii/S1369800114001875}, institution = {FG Physikalische Chemie}, type = {articler}, pages = {93 -- 100}, year = {2017}, }