@inproceedings{HeroldAcker2019, author = {Steven Herold and J{\"o}rg Acker}, title = {Measurement of the temperature dependence of lattice deformations in silicon using Raman microscopy}, booktitle = {9th European Silicon Days, 9-12 September 2018, Saarbr{\"u}cken, Germany, Book of abstracts}, editor = {David Scheschkewitz and Guido Kickelbick}, pages = {S. 197}, year = {2019}, }