@misc{ZoellnerRichardChahineetal.2016, author = {Marvin Hartwig Z{\"o}llner and Marie-Ingrid Richard and Gilbert A. Chahine and Peter Zaumseil and Christian Reich and Giovanni Capellini and Francesco Montalenti and Anna Marzegalli and Ya-Hong Xie and Tobias U. Sch{\"u}lli and Maik H{\"a}berlen and Peter Storck and Thomas Schroeder}, title = {Imaging structure and composition homogeneity of 300 mm SiGe virtual substrates for advanced CMOS applications by scanning X-ray diffraction microscopy}, booktitle = {ACS Applied Materials and Interfaces}, volume = {7}, number = {17}, issn = {1944-8252}, doi = {10.1021/am508968b}, institution = {FG Halbleitermaterialien}, type = {articler}, pages = {9031 -- 9037}, year = {2016}, }