@misc{BauerYamamotoZaumseiletal.2013, author = {J. Bauer and Yuji Yamamoto and Peter Zaumseil and Oksana Fursenko and K. Schulz and Grzegorz Kozłowski and Markus Andreas Schubert and Thomas Schroeder and Bernd Tillack}, title = {Nanostructured Silicon for Ge Nanoheteroepitaxy}, booktitle = {Microelectronics Engineering}, volume = {97}, issn = {0167-9317}, institution = {FG Halbleitermaterialien}, type = {articler}, pages = {169 -- 172}, year = {2013}, }