@misc{ChahineZoellnerRichardetal.2016, author = {Gilbert A. Chahine and Marvin Hartwig Z{\"o}llner and Marie-Ingrid Richard and G. Subhajit and Peter Zaumseil and Giovanni Capellini and Thomas Schroeder and Tobias U. Sch{\"u}lli}, title = {Strain and Lattice Orientation Distribution in SiN/Ge CMOS Compatible Light Emitters Microstructures by Quick X-ray Nano-diffraction Microscopy}, booktitle = {Applied Physics Letters}, volume = {106}, issn = {1077-3118}, doi = {10.1063/1.4909529}, institution = {FG Halbleitermaterialien}, type = {articler}, pages = {071902-1 -- 071902-4}, year = {2016}, }