@misc{LippertDabrowskiOberbecketal.2016, author = {Gunther Lippert and Jarek Marek Dabrowski and Lars Oberbeck and Uwe Schroeder and Ioan Costina and Grzegorz Lupina and Markus Ratzke and Peter Zaumseil and Hans-Joachim M{\"u}ssig}, title = {Morphology and composition of selected high-k materials and their relevance to dielectric properties of thin films}, booktitle = {Journal of the electrochemical society}, volume = {155}, number = {5}, issn = {1945-7111}, doi = {10.1149/1.2875741}, institution = {FG Experimentalphysik und funktionale Materialien}, type = {articler}, pages = {G97 -- G114}, year = {2016}, }