@misc{KostoMoralesDevietal.2023, author = {Yuliia Kosto and Carlos Morales and Anjana Devi and Karsten Henkel and Jan Ingo Flege}, title = {Activity of cerium oxide thin films prepared by atomic layer deposition using custom and commercial precursors}, booktitle = {Verhandlungen der DPG}, issn = {0420-0195}, url = {https://www.dpg-verhandlungen.de/year/2023/conference/skm/part/o/session/42/contribution/4}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {conferenceobject_noref}, year = {2023}, }