@misc{MelnikovSchenkWalletal.2021, author = {Anton Melnikov and Hermann Schenk and Franziska Wall and Barbara Spitz and Lutz Ehrig and Sergiu Langa and Bert Kaiser and Holger Conrad and Harald Schenk and Michael Stolz}, title = {Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation}, booktitle = {SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293}, doi = {10.1117/12.2551271}, institution = {FG Mikro- und Nanosysteme}, type = {conferenceobject_noref}, year = {2021}, }