@misc{WallSchenkMelnikovetal.2024, author = {Franziska Wall and Hermann A. G. Schenk and Anton Melnikov and Bert Kaiser and Harald Schenk}, title = {A non-destructive electro-acoustic method to characterize the pull-in voltage of electrostatic actuators}, booktitle = {Nonlinear Dynamics}, volume = {111}, number = {19}, issn = {1573-269X}, doi = {10.1007/s11071-023-08811-1}, url = {https://link.springer.com/article/10.1007/s11071-023-08811-1}, institution = {FG Mikro- und Nanosysteme}, type = {articler}, pages = {17809 -- 17818}, year = {2024}, }