@inproceedings{KupnikVaithilingamTorashimaetal.2012, author = {Mario Kupnik and Srikant Vaithilingam and Kazutoshi Torashima and Ira O. Wygant and Butrus T. Khuri-Yakub}, title = {CMUT fabrication based on a thick buried oxide layer}, booktitle = {IEEE International Ultrasonics Symposium proceedings}, pages = {547 -- 550}, year = {2012}, }