TY - CONF A1 - Kupnik, Mario A1 - Vaithilingam, Srikant A1 - Torashima, Kazutoshi A1 - Wygant, Ira O. A1 - Khuri-Yakub, Butrus T. T1 - CMUT fabrication based on a thick buried oxide layer T2 - IEEE International Ultrasonics Symposium proceedings Y1 - 2012 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/7307 SN - 978-1-4577-0381-2 SP - 547 EP - 550 PB - IEEE CY - Piscataway, NJ ER -