@inproceedings{TortschanoffBaumgartFranketal.2013, author = {Andreas Tortschanoff and M. Baumgart and A. Frank and Michael Wildenhain and Thilo Sandner and Harald Schenk and Andreas Kenda}, title = {Optical position feedback for electrostatically driven MOEMS-scanners}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, pages = {82520S-1 -- 82520S-8}, url = {http://dx.doi.org/10.1117/12.907761}, year = {2013}, }