@inproceedings{SandnerGrashoffSchwarzenbergetal.2014, author = {Thilo Sandner and Thomas Grashoff and Markus Schwarzenberg and Harald Schenk and Andreas Tortschanoff}, title = {Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, pages = {861605-1 -- 861605-6}, year = {2014}, }