@inproceedings{BergerBrandtFraneketal.2017, author = {Birk Berger and Steven Brandt and James Franek and Edmund Sch{\"u}ngel and Mark Koepke and Julian Schulze and Thomas Mussenbrock and Bastien Bruneau and Erik Johnson and Trevor Lafleur and Jean-Paul Booth and Deborah O'Connell and Timo Gans and Ihor Korolov and Aranka Derzsi and Zolt{\´a}n Donk{\´o}}, title = {Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, doi = {10.1109/PLASMA.2016.7534353}, year = {2017}, }