@misc{BergerBrandtFraneketal.2017, author = {Birk Berger and Steven Brandt and James Franek and Edmund Sch{\"u}ngel and Mark Koepke and Thomas Mussenbrock and Julian Schulze}, title = {Experimental Investigations of Electron Heating Dynamics and Ion Energy Distributions in Capacitive Discharges Driven by Customized Voltage Waveforms}, booktitle = {Journal of Applied Physics}, volume = {118}, number = {22}, issn = {1089-7550}, doi = {10.1063/1.4937403}, institution = {FG Theoretische Elektrotechnik}, type = {articler}, pages = {223302}, year = {2017}, }