@inproceedings{SandnerKimmeGrashoffetal.2015, author = {Thilo Sandner and S. Kimme and Thomas Grashoff and U. Todt and A. Graf and C. Tulea and A. Lenenbach and Harald Schenk}, title = {Micro-scanning mirrors for high-power laser applications in laser surgery}, booktitle = {MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States}, pages = {897705-1 -- 897705-11}, year = {2015}, }