@misc{TammKemellKozlovaetal.2011, author = {Aile Tamm and Marianna Kemell and Jekaterina Kozlova and Timo Sajavaara and Massimo Tallarida and Kaupo Kukli and V. Sammelselg and Mikko Ritala and Markku Leskel{\"a}}, title = {Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxid Thin Films}, booktitle = {Journal of The Electrochemical Society}, volume = {157}, number = {10}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, pages = {G193 -- G201}, year = {2011}, }