@misc{SpitzWallSchenketal.2019, author = {Barbara Spitz and Franziska Wall and Hermann Schenk and Anton Melnikov and Lutz Ehrig and Sergiu Langa and Michael Stolz and Bert Kaiser and Holger Conrad and Harald Schenk and Wolfram Pufe}, title = {Audio-Transducer f{\"u}r In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren}, booktitle = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, institution = {FG Mikro- und Nanosysteme}, type = {conferenceobject_ref}, pages = {54 -- 57}, year = {2019}, }