@misc{KaiserSchenkEhrigetal.2023, author = {Bert Kaiser and Hermann A. G. Schenk and Lutz Ehrig and Franziska Wall and Jorge Mario Monsalve and Sergiu Langa and Michael Stolz and Anton Melnikov and Holger Conrad and David Schuffenhauer and Harald Schenk}, title = {The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers}, booktitle = {Microsystems \& Nanoengineering}, volume = {Vol. 8}, issn = {2055-7434}, doi = {10.1038/s41378-022-00458-z}, institution = {FG Mikro- und Nanosysteme}, type = {articler}, year = {2023}, }