@inproceedings{UhligGaudetLangaetal.2019, author = {Sebastian Uhlig and Matthieu Gaudet and Sergiu Langa and Klaus Schimmanz and Holger Conrad and Bert Kaiser and Harald Schenk}, title = {Electrostatically in-plane driven silicon micropump for modular configuration}, booktitle = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, pages = {57 -- 60}, url = {http://publica.fraunhofer.de/dokumente/N-477736.html}, year = {2019}, }