@misc{ConradGaudetSchenketal.2024, author = {Holger Conrad and Matthieu Gaudet and Harald Schenk and Sebastian Uhlig}, title = {Micromechanical devices with mechanical actuators}, url = {https://www.freepatentsonline.com/11639718.html}, institution = {FG Mikro- und Nanosysteme}, type = {patent}, year = {2024}, }