TY - CONF A1 - Wilczek, Sebastian A1 - Brinkmann, Ralf Peter A1 - Mussenbrock, Thomas T1 - Nonlinear electron resonance heating in asymmetric capacitive discharges T2 - 2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016 Y1 - 2017 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/18198 SN - 978-1-4673-9601-1 PB - IEEE CY - Piscataway, NJ ER -