TY - GEN A1 - Linz, Sarah A1 - Oesterle, Florian A1 - Lindner, Stefan A1 - Mann, Sebastian A1 - Weigel, Robert A1 - Kölpin, Alexander T1 - Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring T2 - IEEE Transactions on Microwave Theory and Techniques Y1 - 2017 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/20167 SN - 0018-9480 SN - 1557-9670 VL - 64 IS - 11 SP - 3918 EP - 3926 ER -