@misc{LinzOesterleLindneretal.2017, author = {Sarah Linz and Florian Oesterle and Stefan Lindner and Sebastian Mann and Robert Weigel and Alexander K{\"o}lpin}, title = {Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring}, booktitle = {IEEE Transactions on Microwave Theory and Techniques}, volume = {64}, number = {11}, issn = {0018-9480}, doi = {10.1109/TMTT.2016.2612664}, institution = {FG Elektronische Systeme und Sensorik}, type = {articler}, pages = {3918 -- 3926}, year = {2017}, }