TY - JOUR A1 - Schulze, Knut A1 - Schuldt, U. A1 - Kahle, Olaf A1 - Schulz, Stefan E. A1 - Uhlig, M. T1 - Novel Low-k Polycyanurates for Integrated circuit (IC) Metallization Y1 - 2006 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/2971 ER -