@article{SchulzeSchuldtKahleetal.2006, author = {Knut Schulze and U. Schuldt and Olaf Kahle and Stefan E. Schulz and M. Uhlig}, title = {Novel Low-k Polycyanurates for Integrated circuit (IC) Metallization}, doi = {10.1016/j.mee.2005.07.016}, year = {2006}, }