@misc{ZhangSunLietal.2013, author = {Wei Zhang and Ke Sun and Biyun Li and Jae Young Lee and Ya-Hong Xie and Jens Katzer and Thomas Schroeder and Xinyu Wei and Thomas P. Russell}, title = {Field Emission Tip Array Fabrication Utilizing Geometrical Hindrance in the Oxidation of Si}, booktitle = {IEEE Transactions on Nanotechnology}, volume = {11}, number = {5}, issn = {1536-125X}, doi = {10.1109/TNANO.2012.2208472}, institution = {FG Halbleitermaterialien}, type = {articler}, pages = {999 -- 1003}, year = {2013}, }