@misc{TallaridaKaravaevSchmeisser2011, author = {Massimo Tallarida and Konstantin Karavaev and Dieter Schmeißer}, title = {HfO2/Si interface formation in atomic layer deposition films: an in situ investigation}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, year = {2011}, }