TY - CONF A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A novel electrostatic micro-actuator class and its application potential for optical MEMS T2 - 2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings Y1 - 2017 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/18782 SN - 978-1-5090-1036-3 SP - Tu 3.11-1 EP - Tu 3.11-2 PB - IEEE CY - Piscataway, NJ ER -