TY - CONF A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2013 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/9058 SN - 978-0-8194-8930-2 SP - 82520C-1 EP - 82520C-10 PB - SPIE Press CY - Bellingham ER -