TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2015 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/13703 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER -