TY - CONF A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Schenk, Harald A1 - Tulea, C. A1 - Lenenbach, A. T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan N2 - We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW. Y1 - 2015 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/13516 SN - 978-1-4799-1512-5 SP - 83 EP - 84 PB - IEEE CY - Piscataway, NJ ER -