TY - GEN A1 - Rietig, Anja A1 - Langner, Thomas A1 - Acker, Jörg T1 - About determining reliable etching rates and the role of temperature in kinetic experiments on acidic wet chemical etching of silicon T2 - Physical Chemistry Chemical Physics Y1 - 2023 UR - https://opus4.kobv.de/opus4-UBICO/frontdoor/index/index/docId/30814 UR - https://pubs.rsc.org/en/content/articlelanding/2023/cp/d2cp05837e SN - 1463-9084 VL - 25 IS - 16 SP - 11387 EP - 11397 ER -