@misc{RietigLangnerAcker2023, author = {Anja Rietig and Thomas Langner and J{\"o}rg Acker}, title = {About determining reliable etching rates and the role of temperature in kinetic experiments on acidic wet chemical etching of silicon}, booktitle = {Physical Chemistry Chemical Physics}, volume = {25}, number = {16}, issn = {1463-9084}, doi = {10.1039/D2CP05837E}, url = {https://pubs.rsc.org/en/content/articlelanding/2023/cp/d2cp05837e}, institution = {FG Physikalische Chemie}, type = {articler}, pages = {11387 -- 11397}, year = {2023}, }