@misc{PopoviciDelabieAdelmannetal.2013, author = {Mihaela Popovici and Annelies Delabie and Christoph Adelmann and Johan Meersschaut and Alexis Franquet and Massimo Tallarida and Jaap van den Berg and Olivier Richard and Johan Swerts and Kazuyuki Tomida and Min-Soo Kim and Hilde Tielens and Hugo Bender and Thierry Conard and Malgorzata Jurczak and Sven van Elshocht and Dieter Schmeißer}, title = {Understanding the Interface Reactions of Rutile TiO2 Grown by Atomic Layer Deposition on Oxidized Ruthenium}, booktitle = {ECS Journal of Solid State Science and Technology}, volume = {2}, number = {1}, issn = {2162-8769}, doi = {10.1149/2.035301jss}, institution = {FG Angewandte Physik und Halbleiterspektroskopie}, type = {articler}, pages = {N23 -- N27}, year = {2013}, }