@misc{RatzkeWolfframmKappaetal.2007, author = {Markus Ratzke and Dirk Wolfframm and Mathias Kappa and Simona Kouteva-Arguirova and J{\"u}rgen Reif}, title = {Pulsed laser deposition of HfO2 and Pr(x)O(y) high-k films on Si(100)}, booktitle = {Applied Surface Science}, volume = {247}, number = {1-4}, issn = {0169-4332}, institution = {FG Experimentalphysik und funktionale Materialien}, type = {articlenr}, pages = {128 -- 133}, year = {2007}, }